AMAT 0190-51379发电机 PDF资料 

1.产 品 资 料 介 绍：

AMAT 0190-51379 发电机

产品应用领域

1. 半导体制造设备

• 作为Applied Materials设备中的关键电源部件，用于提供稳定的能量支持。

• 应用于等离子体刻蚀机、沉积机、离子注入机等工艺环节，保证工艺过程的连续性与稳定性。

2. 真空工艺系统

• 在真空环境下为等离子体源或高频电源模块供能。

• 广泛应用于薄膜沉积（PVD/CVD）、表面处理、薄膜刻蚀等工艺。

3. 光伏与显示面板制造

• 用于光伏电池片生产设备，提供等离子体激励所需的能量。

• 在TFT-LCD和OLED面板制程中，支持大面积玻璃基板加工工艺。

4. 工业等离子体应用

• 应用于精密材料加工，如镀膜、蚀刻、硬化处理等。

• 在需要高频、稳定电源的等离子工艺中作为核心供能单元。

5. 科研与实验平台

• 部署于高端实验室和研发平台，用于测试和验证半导体及新型材料工艺。

• 提供稳定的实验工艺条件，确保实验数据的准确性。

英文资料：

AMAT 0190-51379 Generator

Product application areas

Semiconductor Manufacturing Equipment

As a critical power component in Applied Materials equipment, it is used to provide stable energy support.

Applied to processes such as plasma etching machines, deposition machines, ion implantation machines, etc., to ensure the continuity and stability of the process.

Vacuum process system

Provide power to plasma sources or high-frequency power modules in a vacuum environment.

Widely used in processes such as thin film deposition (PVD/CVD), surface treatment, and thin film etching.

Photovoltaic and display panel manufacturing

Used in photovoltaic cell production equipment to provide the energy required for plasma excitation.

Support large-area glass substrate processing technology in TFT-LCD and OLED panel manufacturing processes.

Industrial plasma applications

Applied to precision material processing, such as coating, etching, hardening treatment, etc.

As the core power supply unit in plasma processes that require high-frequency and stable power supply.

Research and Experimental Platform

Deploy in high-end laboratories and R&D platforms for testing and validating semiconductor and new material processes.

Provide stable experimental process conditions to ensure the accuracy of experimental data.

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