TEL Tokyo Electron  3281-000172-13输入/输出接口 PDF资料 

1.产 品 资 料 介 绍：

中文资料：

Tokyo Electron 3281-000172-13 输入/输出接口模块 — 产品应用领域

该模块是Tokyo Electron（TEL）用于半导体制造设备中的一种关键电子组件，主要负责控制系统与现场设备之间的输入与输出信号交互。其典型应用领域包括以下几方面：

1. 半导体制造设备控制系统
   用于各种半导体设备，如刻蚀机、CVD（化学气相沉积）、PVD（物理气相沉积）、清洗机和扩散炉中，实现对工艺流程中各类传感器、执行器、电磁阀等部件的数字/模拟信号输入输出。

2. 设备内部信号集成接口
   作为主控制板和外围功能模块（如真空泵控制、电源监控、运动控制系统）之间的数据通道，实现稳定快速的数据通信。

3. 自动化系统中的I/O控制
   应用于TEL设备自动化控制系统中，如真空舱体开关控制、气体流量调节、电源状态监控等场景。

4. 设备状态监测与远程诊断
   支持输入/输出状态采集，配合TEL上位机诊断系统用于故障检测和预防性维护。

5. 晶圆搬运与处理系统
   可用于控制晶圆搬运装置、对准系统或传送系统，实现信号控制与位置确认反馈。

6. 洁净室设备接口扩展
   适用于位于洁净环境中的模块化生产设备，通过该接口模块实现设备间模块通信、环境参数采集及信号同步。

英文资料：

Tokyo Electron 3281-000172-13 Input/Output Interface Module - Product Application Fields

This module is a key electronic component used by Tokyo Electron (TEL) in semiconductor manufacturing equipment, mainly responsible for the input and output signal interaction between the control system and field devices. Its typical application areas include the following:

Semiconductor manufacturing equipment control system

Used in various semiconductor devices, such as etching machines, CVD (chemical vapor deposition), PVD (physical vapor deposition), cleaning machines, and diffusion furnaces, to achieve digital/analog signal input and output of various sensors, actuators, solenoid valves, and other components in the process flow.

Internal signal integration interface of the device

As a data channel between the main control board and peripheral functional modules (such as vacuum pump control, power monitoring, motion control system), it achieves stable and fast data communication.

I/O Control in Automation Systems

Applied in TEL equipment automation control systems, such as vacuum chamber switch control, gas flow regulation, power status monitoring, and other scenarios.

Equipment status monitoring and remote diagnosis

Support input/output status collection, in conjunction with TEL upper computer diagnostic system for fault detection and preventive maintenance.

Wafer Handling and Processing System

Can be used to control wafer handling devices, alignment systems, or conveyor systems, achieving signal control and position confirmation feedback.

Expansion of cleanroom equipment interfaces

Suitable for modular production equipment located in clean environments, this interface module enables inter device module communication, environmental parameter acquisition, and signal synchronization.

2.产      品      展      示      

3.其他产品

ASEA ES1822b接口板模块

IS200DTAIH1ABB双系统监测模块

IS200EPSMG1ABB励磁电源模块

4.其他英文产品

GE D20 EME 10BASE-T Digital Control Modu

RADISYS 451558-004 Communication Module

ABB UN0942b-P Programmable Controller

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs