AMAT 0100-00046工控控制卡件
1.产 品 资 料 介 绍:
中文资料:
AMAT 0100-00046是一款用于半导体制造设备的气体分配系统,主要用于将高纯度气体分配到各种半导体加工过程中。以下是该设备的配置说明和功能作用:
AMAT 0100-00046配置说明:
- 气体分配系统:用于将高纯度气体分配到不同的加工过程中。
- 气体纯化系统:用于过滤掉杂质和其他污染物,确保气体的高纯度。
- 气体控制系统:用于控制气体的流量、压力和温度等参数,确保气体的质量和稳定性。
- 管道连接系统:用于连接气体源、气体分配系统和加工设备等部件。
AMAT 0100-00046功能作用:
- 高纯度气体供应:通过气体纯化系统过滤掉杂质和其他污染物,确保供应的气体具有高纯度和可靠性。
- 稳定气体流量和压力控制:通过气体控制系统控制气体的流量、压力和温度等参数,确保气体的质量和稳定性。
- 安全操作:通过管道连接系统连接各个部件,确保气体在运输过程中不会泄漏或发生安全事故。
AMAT 0100-00046应用领域:
- 半导体制造:AMAT 0100-00046可以用于各种半导体加工过程中,如晶圆清洗、薄膜沉积、刻蚀和光刻等。
- 光伏制造:AMAT 0100-00046可以用于太阳能电池的制造过程中,如薄膜沉积和刻蚀等。
- 干燥技术:AMAT 0100-00046可以用于气体流量和压力的控制,以实现干燥技术的精确控制。
英文资料:
AMAT 0100-00046 is a gas distribution system used in semiconductor manufacturing equipment, mainly used to distribute high-purity gas to various semiconductor processing processes. The following are the configuration instructions and functional functions of the device:
AMAT 0100-00046 configuration instructions:
Gas distribution system: used to distribute high-purity gas to different processing processes.
Gas purification system: used to filter out impurities and other pollutants, ensuring the high purity of the gas.
Gas control system: used to control parameters such as gas flow, pressure, and temperature, ensuring the quality and stability of the gas.
Pipeline connection system: used to connect components such as gas sources, gas distribution systems, and processing equipment.
AMAT 0100-00046 Function:
High purity gas supply: Filter out impurities and other pollutants through a gas purification system to ensure high purity and reliability of the supplied gas.
Stable gas flow and pressure control: Control gas flow, pressure, and temperature parameters through a gas control system to ensure gas quality and stability.
Safe operation: Connect various components through a pipeline connection system to ensure that gas does not leak or cause safety accidents during transportation.
AMAT 0100-00046 Application areas:
Semiconductor manufacturing: AMAT 0100-00046 can be used in various semiconductor processing processes, such as wafer cleaning, thin film deposition, etching, and photolithography.
Photovoltaic manufacturing: AMAT 0100-00046 can be used in the manufacturing process of solar cells, such as thin film deposition and etching.
Drying technology: AMAT 0100-00046 can be used for controlling gas flow and pressure to achieve precise control of drying technology.
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