Gasonics 210-0091-001-A端口模块 PDF资料 

1.产 品 资 料 介 绍：

产品概述

Gasonics 210-0091-001-A 是一款用于等离子清洗设备中的端口模块，主要作用是实现工艺腔体与外部设备（如晶圆传送装置、Loadlock、接口传输系统等）之间的物理和信号接口连接。它在设备系统中充当接口节点，确保晶圆传输、气体通道、信号同步等关键功能顺利进行。

技术参数

• 型号：210-0091-001-A

• 类型：端口/接口模块

• 功能：晶圆装载/卸载接口管理、信号与气动控制传递

• 接口类型：多通道电缆连接器 + 气动/真空接头

• 安装方式：面板或设备框架固定式安装

• 通信方式：与主控系统连接，控制腔体门、真空泵、转接口等组件

• 适配平台：Gasonics Aura 系列等离子清洗设备（如 Aura 2000 等）

应用场景

1. 晶圆装载接口控制
   作为晶圆进出工艺腔体的物理接口，与搬运机械臂、传送系统协同工作，保障晶圆安全移交。

2. 气体与真空通道接口
   管理与控制气体注入、真空泵接口的物理连接，实现腔体的工艺气氛维持与交换。

3. 信号联动与同步
   管理工艺控制信号的输入输出，确保外设与腔体间的操作同步，例如门禁、传感器、定位信号等。

4. 维护与更换连接节点
   用作易维护的接口组件，可快速拆装，简化设备故障定位与维护操作。

英文资料：

product overview

Gasonics 210-0091-001-A is a port module used in plasma cleaning equipment. Its main function is to achieve physical and signal interface connections between the process chamber and external devices such as wafer transfer devices, Loadlocks, interface transmission systems, etc. It serves as an interface node in the device system, ensuring the smooth operation of key functions such as wafer transfer, gas channels, and signal synchronization.

Technical Parameter

Model: 210-0091-001-A

Type: Port/Interface Module

Function: Wafer loading/unloading interface management, signal and pneumatic control transmission

Interface type: Multi channel cable connector+pneumatic/vacuum joint

Installation method: Fixed installation of panel or equipment frame

Communication method: Connect with the main control system to control components such as chamber doors, vacuum pumps, and rotary interfaces

Adaptation platform: Gasonics Aura series plasma cleaning equipment (such as Aura 2000, etc.)

Application scenarios

Wafer loading interface control

As the physical interface for wafer entry and exit in the process chamber, it works in conjunction with the handling robotic arm and conveyor system to ensure the safe transfer of wafers.

Gas and vacuum channel interface

Manage and control the physical connection of gas injection and vacuum pump interface to maintain and exchange the process atmosphere in the chamber.

Signal linkage and synchronization

Manage the input and output of process control signals to ensure synchronous operation between peripherals and chambers, such as access control, sensors, positioning signals, etc.

Maintain and replace connection nodes

Used as an easy to maintain interface component, it can be quickly disassembled and disassembled, simplifying equipment fault location and maintenance operations.

2.产      品      展      示      

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品牌：Gasonics

型号：210-0091-001-A端口模块

质保：一年

成色：全新/二手

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