Gasonics 90-1079故障检测模块 PDF资料
1.产 品 资 料 介 绍：
产品概述
Gasonics 90-1079 是一款专用于等离子清洗设备的故障检测模块，主要用于监控设备运行状态、检测系统异常，并向控制系统发出报警或停机信号。它通常集成于 Gasonics Aura 系列设备中，确保工艺过程的稳定性与安全性。
技术参数（典型特性）
模块类型：电子故障检测模块
检测内容：电源状态、信号中断、传感器失效、真空/气压异常等
接口类型：与主控板或PLC通过并行/串行信号通信
适用设备：Gasonics Aura 1000 / 2000 等等离子清胶系统
应用场景
等离子清洗系统自诊断
实时监控腔体内各类工艺信号，一旦发现异常，触发系统报警或停止处理，保护晶圆不受损。工艺过程监控保护
对关键部件如电源、气体控制器、射频发生器等运行状态进行持续检测。故障隔离与报警提示
在系统检测到气压、电压或温度等参数偏离正常范围时发出报警，有助于快速定位故障点。
产品优势
提高设备安全性：可及时发现潜在风险并中止工艺，防止设备损坏
模块化设计：方便更换与维护，适用于长期运行环境
诊断精确：配合主控系统，能详细报告异常部位，有助于运维效率
适配性强：与多型号 Gasonics 系统兼容，支持定制维护方案
英文资料：
product overview
Gasonics 90-1079 is a fault detection module specifically designed for plasma cleaning equipment, mainly used to monitor equipment operation status, detect system abnormalities, and issue alarm or shutdown signals to the control system. It is usually integrated into the Gasonics Aura series equipment to ensure the stability and safety of the process.
Technical parameters (typical characteristics)
Module type: Electronic fault detection module
Detection content: power status, signal interruption, sensor failure, vacuum/air pressure abnormality, etc
Interface type: Communicate with the main control board or PLC through parallel/serial signals
Applicable equipment: Gasonics Aura 1000/2000 plasma cleaning system, etc
Application scenarios
Self diagnosis of plasma cleaning system
Real time monitoring of various process signals inside the cavity, once abnormalities are detected, the system will trigger an alarm or stop processing to protect the wafer from damage.
Process monitoring and protection
Continuously monitor the operational status of key components such as power supply, gas controller, RF generator, etc.
Fault isolation and alarm prompt
When the system detects that parameters such as air pressure, voltage, or temperature deviate from the normal range, issuing an alarm can help quickly locate the fault point.
Product advantages
Improving equipment safety: potential risks can be detected in a timely manner and processes can be suspended to prevent equipment damage
Modular design: easy to replace and maintain, suitable for long-term operating environments
Accurate diagnosis: In conjunction with the main control system, it can provide detailed reports of abnormal areas, which helps improve operational efficiency
Strong adaptability: compatible with multiple Gasonics systems and supports customized maintenance solutions
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