Gasonics 38378-4控制板 PDF资料
1.产 品 资 料 介 绍：
产品名称
Gasonics 38378-4 控制板
产品应用领域
等离子体设备核心控制单元
用于 Gasonics 等离子灰化或蚀刻系统中，作为子系统或整机的控制逻辑执行板，管理流程指令与信号处理。工艺参数管理与执行
负责控制加热、气体流量、射频功率等关键工艺参数，确保设备在设定工艺窗口内稳定运行。信号处理与接口协调
集成输入/输出接口电路，接收来自传感器、开关、执行器的信号，并与上位系统或主控板通信。模块级设备协调控制
管理特定设备模块（如真空腔室、RF系统、冷却单元）的运行状态，实现多模块间的协同与联动。系统维护与快速替换
在设备维护或升级过程中，可作为替换板卡恢复控制功能，缩短维修时间、降低设备停机风险。支持故障报警与状态反馈
提供工艺中各项异常状态的检测与反馈功能，提升系统的自我诊断与保护能力。
英文资料：
product name
Gasonics 38378-4 Control Board
Product application areas
Core control unit of plasma equipment
Used in Gasonics plasma ashing or etching systems as a control logic execution board for subsystems or the entire machine, managing process instructions and signal processing.
Process parameter management and execution
Responsible for controlling key process parameters such as heating, gas flow rate, and RF power to ensure stable operation of equipment within the set process window.
Signal processing and interface coordination
Integrated input/output interface circuit, receives signals from sensors, switches, and actuators, and communicates with the upper system or main control board.
Module level equipment coordination control
Manage the operational status of specific equipment modules (such as vacuum chambers, RF systems, cooling units) to achieve collaboration and linkage among multiple modules.
System maintenance and rapid replacement
During equipment maintenance or upgrade, it can be used as a replacement board to restore control functions, shorten maintenance time, and reduce equipment downtime risks.
Support fault alarm and status feedback
Provide detection and feedback functions for various abnormal states in the process, enhancing the system's self diagnosis and protection capabilities.
2.产 品 展 示
3.其他产品
4.其他英文产品
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