Gasonics 90-27004热溶液模块 PDF资料
1.产 品 资 料 介 绍：
产品名称
Gasonics 90-27004 热溶液模块
产品应用领域
湿法工艺辅助加热系统
用于 Gasonics 半导体处理设备中，在特定清洗或化学处理工艺中对化学溶液进行加热，确保工艺温度恒定。化学品温控供给
控制并维持化学溶液（如去胶液、去离子水、剥离液等）在设定温度范围内，提高清洗或刻蚀效率。等离子处理前后清洗配套模块
与主处理腔体协同工作，用于等离子处理工艺前后的清洗或残留物去除步骤中，优化整体制程。温度控制与安全联锁功能
搭载温控单元与安全保护机制，防止溶液过热、干烧或温度漂移，提升设备运行安全性与稳定性。模块化供液系统组成部分
与供液、过滤、循环系统集成，形成完整的热化学液体管理单元，便于设备结构模块化维护。设备维修与备件更换
作为原厂模块，用于现有系统中的更换或升级，恢复热液体供给功能，保持工艺一致性。
英文资料：
product name
Gasonics 90-27004 Hot Solution Module
Product application areas
Wet process auxiliary heating system
Used in Gasonics semiconductor processing equipment to heat chemical solutions during specific cleaning or chemical treatment processes, ensuring a constant process temperature.
Chemical temperature control supply
Control and maintain chemical solutions (such as debonding solution, deionized water, stripping solution, etc.) within the set temperature range to improve cleaning or etching efficiency.
Cleaning module before and after plasma treatment
Collaborate with the main processing chamber to optimize the overall process during the cleaning or residue removal steps before and after plasma treatment.
Temperature control and safety interlock function
Equipped with a temperature control unit and safety protection mechanism, it prevents the solution from overheating, dry burning, or temperature drift, improving the safety and stability of equipment operation.
Components of modular liquid supply system
Integrate with the supply, filtration, and circulation systems to form a complete thermochemical liquid management unit, facilitating modular maintenance of equipment structure.
Equipment maintenance and spare parts replacement
As an original module, it is used for replacing or upgrading existing systems, restoring the function of hot liquid supply, and maintaining process consistency.
2.产 品 展 示
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