Gasonics 73797-05控制主板 PDF资料
1.产 品 资 料 介 绍：
Gasonics 73797‑05 控制主板（Controller Mainboard）
功能与作用
该模块是一款关键的逻辑控制电路板，通常被称为 SCR 控制板或 PWA 屏控制板，在 Gasonics 等离子体处理设备中用于核心控制任务。
执行控制系统的主要指令运算与分发，包括功率调节、气体切换、安全联锁与故障保护等功能。
接收来自人机界面或主控板的命令，并下达控制信号至各子系统。
应用领域
Gasonics Aura 系列、PEP 系列及 A‑2000LL 等离子体剥离设备中的核心控制模块。
控制 RF 功率系统、加热/灯管控制、电源管理、气体流动切换与传感器反馈处理。
应用于半导体晶圆清洗、光刻胶去除、封装前预处理等关键工艺设备。
高洁净度自动化生产系统中用于稳定控制与联锁协调。
特点与优势
工业级 PCB 设计，抗电磁干扰强，具备长期运行稳定性。
与 Gasonics 系列设备其他板卡（如 A90‑005 控制板、气体接口板、电源板等）结构兼容性高。
模块化设计，便于替换、维修和系统升级。
英文资料：
Gasonics 73797-05 Controller Mainboard
Function and Function
This module is a critical logic control circuit board, commonly referred to as an SCR control board or PWA screen control board, used for core control tasks in Gasonics plasma processing equipment.
The main instruction calculation and distribution of the execution control system include functions such as power regulation, gas switching, safety interlocking, and fault protection.
Receive commands from the human-machine interface or main control board and issue control signals to various subsystems.
application area
The core control module in Gasonics Aura series, PEP series, and A-2000LL plasma stripping equipment.
Control RF power system, heating/lamp control, power management, gas flow switching, and sensor feedback processing.
Applied to key process equipment such as semiconductor wafer cleaning, photoresist removal, and pre-treatment before packaging.
Used for stable control and interlocking coordination in high cleanliness automated production systems.
Characteristics and advantages
Industrial grade PCB design, strong resistance to electromagnetic interference, and long-term operational stability.
High structural compatibility with other boards in the Gasonics series equipment, such as A90-005 control board, gas interface board, power board, etc.
Modular design facilitates replacement, maintenance, and system upgrades.
2.产 品 展 示
3.其他产品
GE ENERGY HYDRAN H201Ci-1 单通道控制器
4.其他英文产品
AMAT 0190-11415 Digital Input Module
ASEA 2668 184-447 Communication Module
| 745-W2-P5-G5-HI-A | 8030-PV-28 | X-FTA 007 02L |
| 745-W2-P5-G5-HI | 8030-PS-70 | X-FTA 006 02L |
| 745-W2-P1-G1-LO-E | 8030-PS-51 | X-FTA 006 01L |
| 745-W2-P1-G1-HI-T-H | 8030-PS-41 | X-FTA 005 02L |
| 745-W2-P15-G1-LO-A-R | 8030-RIM-331 | X-FTA 003 02L 02R |
| 735-5-5-LO-485 | 8030-RIM-25 | X-FTA 002 02L 02R |
