Gasonics 04290-101负载锁 PDF资料
1.产 品 资 料 介 绍：
Gasonics 04290-101 负载锁
产品功能与作用：
实现晶圆在负载锁腔体与处理腔体之间的安全垂直转移
保持转移过程中的气密性，防止晶圆污染
配合设备自动化控制系统，实现高效自动上下料操作
应用领域：
半导体晶圆制造设备中的负载锁腔体
等离子体剥离和清洗设备的晶圆转移系统
显示面板制造中的基板气密转移环境
微电子器件生产线中晶圆的洁净转移
其他要求高洁净度和高真空环境的自动化制造系统
特点：
与控制系统和气体管理系统紧密配合，保证工艺稳定性
设计符合高洁净度生产要求
支持自动化、高精度的晶圆转移操作
英文资料：
Gasonics 04290-101 Load Lock
Product Function and Function:
Realize safe vertical transfer of wafers between the load lock chamber and the processing chamber
Maintain airtightness during the transfer process to prevent wafer contamination
Cooperate with the equipment automation control system to achieve efficient automatic loading and unloading operations
Application areas:
Load lock chamber in semiconductor wafer manufacturing equipment
Wafer transfer system for plasma stripping and cleaning equipment
Substrate airtight transfer environment in display panel manufacturing
Clean transfer of wafers in microelectronic device production lines
Other automated manufacturing systems that require high cleanliness and high vacuum environment
characteristic:
Closely cooperate with the control system and gas management system to ensure process stability
Design to meet high cleanliness production requirements
Support automated and high-precision wafer transfer operations
2.产 品 展 示
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| 850-EP1NNG1LNNAANGSPHB3ACNBN | AMAT 0100-01467 | 073-655003-00 |
| 845-EP5H5G5HSNAAFGSPFA3ACNAN | AMAT 0100-01401 | 710-607901-002 |
| 845-EP5H5G5HNNAANGSSFB2ESNBN | AMAT 0100-71320 | 710-615443-001 |
| 845-EP5H5G5HNNAANGSPFBSENNBN | AMAT 0100-AE018 | 780-10727-002 |
| 845-EP5H5G5HNNAANGASFB2ESNBN | AMAT 0100-01339 | ICS TRIPLEX R65C52P2 |
| 820-23550-000 | AMAT 0100-09213 | EXM-13A |
