Gasonics 95-3510-44气门组件 PDF资料
1.产 品 资 料 介 绍：
一、基本信息
| 项目 | 内容 |
|---|---|
| 部件号 | 95-3510-44 |
| 名称 | 气门组件 / Valve Assembly |
| 适用设备 | Gasonics 等离子清洗系统（如 AURA、A-2000 系列） |
| 制造商 | Gasonics / Novellus（现属 Applied Materials） |
| 类型 | 气路控制模块（气动或电磁） |
二、功能用途
该组件为 Gasonics 设备中的 气体流路控制单元，用于控制气体的开关、流向、吹扫或切换，通常集成在：
Process Chamber（处理腔）
Loadlock（负载锁）
Gas Manifold（气体总管）
Vent/Pump 管路接口
常用于以下功能场景：
| 功能类型 | 说明 |
|---|---|
| Vent 控制 | 控制腔体排气/通气 |
| 气体通断 | 控制 N₂、O₂、Ar 等过程气体通断 |
| 真空隔离 | 控制真空腔体与真空泵之间阀门 |
| 吹扫/排放 | 控制吹扫气切换或废气排出路径 |
三、组件构成（典型气门组件）
虽然 95-3510-44 具体结构需参考实物或手册，但典型 Gasonics 气门组件包含以下部分：
| 部件 | 说明 |
|---|---|
| 主阀体 | 高洁净气动或电磁控制阀 |
| 电磁线圈 | 驱动阀芯动作（可 24VDC 控制） |
| 接头/管道连接件 | 与 Swagelok 或 VCR 管线连接 |
| 支架或模块底座 | 安装于设备内气体机柜 |
| 信号线缆接口 | 接入控制板（如 A90 系列）输出信号 |
英文资料：
1、 Basic Information
Project Content
Part number 95-3510-44
Name: Valve Assembly
Applicable equipment Gasonics plasma cleaning system (such as AURA, A-2000 series)
Manufacturer Gasonics/Novellus (now part of Applied Materials)
Type of pneumatic control module (pneumatic or electromagnetic)
2、 Functional purpose
This component is the gas flow control unit in Gasonics equipment, used to control the switching, flow direction, blowing or switching of gas, usually integrated in:
Process Chamber
Loadlock
Gas manifold
Vent/Pump pipeline interface
Commonly used in the following functional scenarios:
Function type description
Vent control chamber exhaust/ventilation
Gas on-off control for processes such as N ₂, O ₂, Ar, etc
Vacuum isolation control valve between vacuum chamber and vacuum pump
Blowing/emission control blowing gas switching or exhaust gas discharge path
3、 Component composition (typical valve components)
Although the specific structure of 95-3510-44 needs to refer to the physical object or manual, a typical Gasonics valve assembly includes the following parts:
Component Description
Main valve body high cleanliness pneumatic or electromagnetic control valve
Electromagnetic coil drives valve core action (can be controlled by 24VDC)
Connectors/pipe fittings for connecting to Swagelok or VCR pipelines
The bracket or module base is installed in the gas cabinet inside the equipment
Connect the signal cable interface to the control board (such as A90 series) to output signals
2.产 品 展 示
3.其他产品
ABB TVB-1202-1ANET 1381-647980-12 电路板模块
4.其他英文产品
ASEA 2668 180-291 slot control
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