Gasonics 06763-005控制板 PDF资料
1.产 品 资 料 介 绍：
一、基本信息
部件号：06763-005
名称：控制板（Control Board）
设备厂商：Gasonics（现隶属于 Applied Materials）
用途类别：设备内部子系统控制 / 接口协调
二、功能简介
06763-005 控制板是一块用于 Gasonics 等离子体剥离系统中的功能模块控制板，其主要作用是：
管理某个子系统或外设（如电梯、传感器、电源模块等）的状态与动作
执行系统控制命令（逻辑控制、开关动作、继电驱动）
实现设备控制信号的输入输出（I/O 处理）
与主控板通信，反馈状态或接受命令
三、可能用途（依照类似型号逻辑）
虽然该板为非主控板（如 A90-003-01），但通常承担以下功能之一：
| 功能方向 | 说明 |
|---|---|
| 电梯控制 | 控制 Loadlock 或 Process Chamber 内的升降平台动作 |
| 电磁阀驱动 | 控制气动阀门通断，支持自动流程 |
| 光电传感器管理 | 接收来自上片/下片感应器、门位开关的状态 |
| 状态联锁管理 | 向主控发送系统是否准备好、门是否关闭等信息 |
英文资料：
1、 Basic Information
Part number: 06763-005
Name: Control Board
Equipment manufacturer: Gasonics (now under Applied Materials)
Usage category: Control of internal subsystems/interface coordination of equipment
2、 Function Introduction
The 06763-005 control board is a functional module control board used in the Gasonics plasma stripping system. Its main functions are:
Manage the status and actions of a subsystem or peripheral device (such as elevators, sensors, power modules, etc.)
Execute system control commands (logic control, switch action, relay drive)
Implement input/output (I/O processing) of device control signals
Communicate with the main control board, provide feedback on status or receive commands
3、 Possible uses (based on similar model logic)
Although the board is a non main control board (such as A90-003-01), it usually performs one of the following functions:
Functional Direction Description
Elevator control controls the movement of the lifting platform within Loadlock or Process Chamber
Electromagnetic valve drives and controls the on/off of pneumatic valves, supporting automatic processes
Photoelectric sensor management receives status from upper/lower sensors and door switches
The status interlock management sends information to the main control, such as whether the system is ready and whether the door is closed
2.产 品 展 示
3.其他产品
ABB TVB-1202-1ANET 1381-647980-12 电路板模块
4.其他英文产品
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