Gasonics PT-9012-286机器人控制器板 PDF资料
1.产 品 资 料 介 绍：
一、基本信息
部件号：PT-9012-286
名称：机器人控制器板 / Robot Controller Board
制造商：Gasonics / Novellus（后并入 Applied Materials）
用途：用于控制 wafer transfer robot（晶圆搬运机械手）的动作执行与反馈处理
二、功能说明
该控制板是 Gasonics 等离子体剥离设备中 transfer robot 的主要驱动与控制单元，用于实现晶圆自动上下料过程中的以下功能：
| 功能 | 描述 |
|---|---|
| 运动控制 | 控制机械臂的 X（水平）、Z（升降）、θ（旋转）轴精确运动 |
| 位置反馈 | 接收来自编码器或传感器的位置信号 |
| 状态联锁 | 与主控系统交换 Ready、Busy、Error 等状态信号 |
| 晶圆检测 | 处理手臂上的 presence sensor 或 vacuum sensor 数据 |
| 命令执行 | 接收主控程序发出的动作指令（如 pick、place、home） |
三、适用设备
该控制板主要用于以下系统中的 wafer transfer robot 控制：
Gasonics A-2000 / A-2000LL
Gasonics Aura 2000 / 3010 系列
Gasonics PEP 3510 / 3600 系列
某些 Gasonics OEM 等离子体处理设备中也兼容使用
英文资料：
1、 Basic Information
Part number: PT-9012-286
Name: Robot Controller Board
Manufacturer: Gasonics/Novellus (later merged into Applied Materials)
Purpose: Used to control the action execution and feedback processing of wafer transfer robots
2、 Function Description
This control board is the main driving and control unit of the transfer robot in Gasonics plasma stripping equipment, used to achieve the following functions during the automatic wafer loading and unloading process:
Function Description
Motion control controls the precise movement of the X (horizontal), Z (lifting), and θ (rotation) axes of the robotic arm
Position feedback receives position signals from encoders or sensors
Exchange status signals such as Ready, Busy, Error, etc. between the state interlock and the main control system
Presence sensor or vacuum sensor data on the wafer inspection processing arm
Command execution receives action instructions from the main control program (such as pick, place, home)
3、 Applicable equipment
This control board is mainly used for wafer transfer robot control in the following systems:
Gasonics A-2000 / A-2000LL
Gasonics Aura 2000/3010 series
Gasonics PEP 3510/3600 series
Some Gasonics OEM plasma processing equipment is also compatible for use
2.产 品 展 示
3.其他产品
4.其他英文产品
LAM 810-800081-016 CPU motherb
Siemens 6ES7291-8GC00-0XA0 cartridge
Kollmorgen MMC-SD-0.5-230-D servo drive
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| CA950-IO | Gespac GESINP-2B 8720 | NTCF01 |
| BAF3644-5081-56BC | Gespac GESCIO-1 8915 | NMFC03 |
| BA3724-4489-56C | GESPAC GESDAC-1 GESDAC1 | NMFC04 |
| BA3648-4650-9-56BC | ADC-12A GESADC-12A 9310 GESPCB-334 | IMMFP03 |
| BA3644-4249-1-48C | GESPAC GESXT-11 GESXT11 | IMMPI01 |
