Gasonics 04290-201负载锁电梯 PDF资料
1.产 品 资 料 介 绍：
Gasonics 04290-201 负载锁电梯（Loadlock Elevator）
一、组件简介
名称：负载锁电梯
部件号：04290-201
适用设备：Gasonics A-2000 / A-2000LL / Aura 系列 等离子体剥离机
功能类型：Wafer Loadlock 升降机构组件
二、主要功能
该模块是安装在 Loadlock（负载锁腔体） 内的垂直升降执行部件，用于：
承载晶圆承盘（Wafer Boat、Wafer Plate）
在上下料过程中将晶圆从 Transfer Robot 接口位置移动至处理位置或相反
配合气压、真空、位置传感器实现精准定位与自动化操作
三、核心技术特性
| 参数 | 描述 |
|---|---|
| 驱动方式 | 多数采用步进电机驱动或伺服电机 + 丝杆结构 |
| 升降行程 | 一般为 100mm~300mm，根据腔体高度设计 |
| 位置控制 | 带有上下限位传感器，支持中位精确停止 |
| 接口控制 | 与主控制器（如 A90-003-01）或 Elevator Driver 模块联动 |
| 负载能力 | 支持单片或整片 Wafer 托盘升降（6" / 8" 兼容） |
英文资料：
Gasonics 04290-201 Load Lock Elevator
1、 Component Introduction
Name: Load Lock Elevator
Part number: 04290-201
Applicable equipment: Gasonics A-2000/A-2000LL/Aura series plasma stripping machine
Function type: Wafer Loadlock lifting mechanism component
2、 Main functions
This module is a vertical lifting actuator installed in the Loadlock chamber, used for:
Wafer Boat, Wafer Plate
During the loading and unloading process, move the wafer from the Transfer Robot interface position to the processing position or vice versa
Cooperate with pressure, vacuum, and position sensors to achieve precise positioning and automated operation
3、 Core technical characteristics
Parameter description
Most driving methods use stepper motor drive or servo motor+screw structure
The lifting stroke is generally 100mm~300mm, designed according to the height of the cavity
Position control with upper and lower limit sensors, supporting precise stop in the center position
Interface control is linked with the main controller (such as A90-003-01) or Elevator Driver module
Load capacity supports single or whole wafer tray lifting (6 "/8" compatible)
2.产 品 展 示
3.其他产品
4.其他英文产品
ASEA 57360001-HG Circuit Board
AMAT 0190-66253 Communication Module
| F43GCNA-R2-NS-NV-00 | 531X124MSDAJG2 | TRICONEX 4609 |
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| EP3752-5215-7-56BC-CU | 531X124MSDAHG2 | EPC-26-0-0 |
| EP3648-4952-7-56BC-CU | 531X124MSDAHG1 | EPC-16 |
| EP3644-5214-7-56BC-CU | 531X124MSDAGG2 | 8MC12 |
| EP3640-1436-7-56BC-CU | 531X124MSDAGG1 | 330730-040-00-00 |
