Gasonics A97-127-01 控制器模块 PDF资料
1.产 品 资 料 介 绍：
Gasonics A97-127-01 控制器模块 是一款用于 Gasonics 等离子体剥离系统中的专用控制器单元，用于控制特定子系统（如气体通道、腔体真空、RF源、载具传输或安全联锁等）的状态和操作逻辑。它通常作为中间层模块，连接前端面板、主控板（如 A90 系列）和执行组件。
一、基本信息
| 项目 | 内容 |
|---|---|
| 部件编号 | A97-127-01 |
| 名称 | 控制器模块（Controller Module） |
| 制造商 | Gasonics / Applied Materials |
| 设备适用 | Gasonics PEP、Aura、L3510、AE 系列等等离子体剥离系统 |
| 类别定位 | I/O 控制扩展模块 / 子系统驱动控制器 |
二、核心功能与作用
| 功能类别 | 描述 |
|---|---|
| 信号处理 | 接收主控系统的控制指令，对输出信号进行放大、隔离、分配 |
| 执行驱动 | 控制电磁阀、继电器、风扇、泵或灯等外围子设备 |
| 状态反馈 | 将子系统工作状态返回主控系统（如气压 OK、门已闭、真空稳定） |
| 联锁管理 | 实现过程控制联锁，例如：未抽真空则RF禁用 |
| 模块通信 | 可能通过专用并口/串口与主控制器或其他板卡通信 |
英文资料：
The Gasonics A97-127-01 controller module is a specialized controller unit used in Gasonics plasma stripping systems to control the status and operational logic of specific subsystems such as gas channels, chamber vacuum, RF sources, vehicle transmission, or safety interlocks. It usually serves as an intermediate module, connecting the front-end panel, main control board (such as A90 series), and execution components.
1、 Basic Information
Project Content
Part number A97-127-01
Name Controller Module
Manufacturer Gasonics/Applied Materials
The equipment is suitable for plasma stripping systems such as Gasonics PEP, Aura, L3510, AE series, etc
Category positioning I/O control expansion module/subsystem driver controller
2、 Core functions and roles
Functional category description
Signal processing receives control instructions from the main control system, amplifies, isolates, and distributes output signals
Execute peripheral sub devices such as drive control solenoid valves, relays, fans, pumps, or lights
Status feedback returns the working status of the subsystem to the main control system (such as air pressure OK, door closed, vacuum stable)
Interlocking management realizes process control interlocking, for example: RF is disabled if no vacuum is drawn
Module communication may be communicated with the main controller or other boards through dedicated parallel/serial ports
2.产 品 展 示
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ABB REG670 1MRK002826-AC 安全系统组件
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| IC3600KMRA5 | 531X135PRGALM1 | IC3600ADAD1A |
