Gasonics A90-003-01控制板 PDF资料
1.产 品 资 料 介 绍：
Gasonics A90-003-01 控制板（Controller Board） 是 Gasonics 等离子体剥离设备中的关键电子控制组件之一，主要负责协调各子系统的运行、管理输入输出信号、驱动执行元件、执行逻辑判断等。它在设备的自动化控制中扮演着“大脑”角色。
一、基本信息
| 项目 | 说明 |
|---|---|
| 部件编号 | A90-003-01 |
| 产品名称 | 控制板 / 控制器主板 |
| 适用设备 | Gasonics 等离子体剥离系统，如 PEP 3510、Aura 系列等 |
| 功能类型 | 核心 I/O 控制逻辑板，用于处理信号输入输出、驱动、反馈与通讯 |
二、主要功能
| 功能类别 | 描述 |
|---|---|
| I/O 信号处理 | 处理来自传感器、按钮、开关等的数字/模拟信号 |
| 执行器驱动 | 控制真空泵、气体阀、RF源、电磁继电器等设备 |
| 状态监控 | 实时监控腔体状态、电源状态、温度、真空等系统关键参数 |
| 联锁与报警 | 实现关键过程安全联锁机制，如门未关锁、温度过高报警等 |
| 通信功能 | 与控制面板（如 90-2678B）、主控制器或上位机通信 |
英文资料：
The Gasonics A90-003-01 Controller Board is one of the key electronic control components in the Gasonics plasma stripping equipment, mainly responsible for coordinating the operation of various subsystems, managing input and output signals, driving execution components, executing logic judgments, etc. It plays the role of the "brain" in the automation control of equipment.
1、 Basic Information
Project Description
Part number A90-003-01
Product Name: Control Board/Controller Motherboard
Applicable equipment Gasonics plasma stripping system, such as PEP 3510, Aura series, etc
Functional type core I/O control logic board, used for processing signal input/output, driving, feedback, and communication
2、 Main functions
Functional category description
I/O signal processing deals with digital/analog signals from sensors, buttons, switches, etc
The actuator drives and controls equipment such as vacuum pumps, gas valves, RF sources, electromagnetic relays, etc
Real time monitoring of key system parameters such as chamber status, power status, temperature, vacuum, etc
Interlocking and alarm implementation of key process safety interlocking mechanisms, such as door not being locked, high temperature alarm, etc
Communication function and control panel (such as 90-2678B), main controller or upper computer communication
2.产 品 展 示
3.其他产品
4.其他英文产品
NI PCI4451 Data Acquisition Card
Emerson P144.R4 Intelligent I/O Board
ABB XVC768117 Field Input/Output Module
| IC3600KRSS1 | 531X139APMAEM1 | IC3600AFRA1A1A |
| IC3600KRSR1 | 531X139APMAEG2 | IC3600AFRA1 |
| IC3600KRSP1A | 531X139APMACM7 | IC3600AFGD1 |
| IC3600KRSE2 | 531X139APMACG2 | IC3600AFGC1C |
| IC3600KRSD2 | 531X139APMABM6 | IC3600AFGC1B |
| IC3600KRSD1 | 531X139APMAAM6 | IC3600AFGB1C1B |
