Gasonics A90-005-02控制器板 PDF资料
1.产 品 资 料 介 绍：
Gasonics A90-005-02 控制器板（Controller Board） 是一块用于 Gasonics 等离子体剥离设备中的高集成控制电路板，主要负责子系统（如 RF、电源、气体、真空等）的信号处理、状态反馈、驱动控制与逻辑判断。该控制器板为设备提供关键的自动化控制能力，是核心电子模块之一。
一、产品概述
型号：A90-005-02
类型：控制器板 / I/O 控制板 / 逻辑处理模块
制造商：Gasonics（Applied Materials 子品牌，专注于等离子体剥离）
该控制板多用于 Gasonics 设备的中央控制区域，连接各类传感器、执行器及上位控制系统，如 PLC 或主控制电脑。
二、核心功能
| 控制功能类别 | 描述 |
|---|---|
| I/O信号处理 | 接收和输出多通道数字/模拟信号，用于控制气体阀门、泵、加热器等 |
| 设备状态监控 | 实时读取传感器数据，如温度、压力、流量，并反馈给主系统 |
| 过程联锁与报警 | 实现腔体开关、气路切换、RF上电等过程控制的安全联锁 |
| 接口通信 | 与上位系统（如面板控制器、主控计算机）进行串行/并行通信 |
| 电源与保护 | 板载部分稳压供电、过载保护和自诊断电路 |
三、应用设备
Gasonics A90-005-02 控制器板可能广泛应用于以下设备：
Gasonics Aura 2000 / Aura 3010
Gasonics PEP 3510 / 3600
Gasonics L3510 系列等离子体剥离系统
其他定制型号或 OEM 合作设备（与 TEL、Lam 兼容）
英文资料：
The Gasonics A90-005-02 Controller Board is a highly integrated control circuit board used in Gasonics plasma stripping equipment, mainly responsible for signal processing, status feedback, drive control, and logic judgment of subsystems such as RF, power supply, gas, vacuum, etc. This controller board provides critical automation control capabilities for the equipment and is one of the core electronic modules.
1、 Product Overview
Model: A90-005-02
Type: Controller Board/I/O Control Board/Logic Processing Module
Manufacturer: Gasonics (a sub brand of Applied Materials, specializing in plasma stripping)
This control board is commonly used in the central control area of Gasonics equipment, connecting various sensors, actuators, and upper control systems such as PLC or main control computer.
2、 Core functions
Description of Control Function Categories
I/O signal processing receives and outputs multi-channel digital/analog signals for controlling gas valves, pumps, heaters, etc
Real time reading of sensor data such as temperature, pressure, and flow rate for equipment status monitoring, and feedback to the main system
Process interlocking and alarm realize safety interlocking for process control such as cavity switch, gas path switching, RF power on, etc
Interface communication with upper systems (such as panel controllers, main control computers) for serial/parallel communication
Power supply and protection board onboard stabilized power supply, overload protection, and self diagnostic circuit
3、 Application devices
The Gasonics A90-005-02 controller board may be widely used in the following devices:
Gasonics Aura 2000 / Aura 3010
Gasonics PEP 3510 / 3600
Gasonics L3510 series plasma stripping system
Other customized models or OEM cooperative equipment (compatible with TEL and Lam)
2.产 品 展 示
3.其他产品
4.其他英文产品
GE IS200TRLYH1B power converter
ASEA DSQC108 controller backplane
FOXBORO RH926GH Control Input Card
| IC3600LIBA1A | 531X144DRGAAGI | IC3600AOAC1E |
| IC3600LIBA1 | 531X144DRGAAG1 | IC3600AOAC1C |
| IC3600LGXA1A | 531X140CCHAYM2 | IC3600AOAC1 |
| IC3600LGXA1 | 531X140CCHATM2 | IC3600AOAB1 |
| IC3600LFFA1 | 531X140CCHASM2 | IC3600AOAA2D1 |
| IC3600LFAA1 | 531X140CCHANM2 | IC3600AOAA2B |
