Gasonics 90-1031-01接口板 PDF资料
1.产 品 资 料 介 绍：
Gasonics 90-1031-01 接口板（Interface Board） 是 Gasonics 等离子体剥离设备中的关键信号中继模块，用于连接主控制系统与各执行/检测子模块之间的电气信号，实现设备内部的数据通信、控制信号分发与状态反馈等功能。
一、产品概述
Gasonics 90-1031-01 接口板是专为 Gasonics 系列等离子设备设计的一款信号接口模块，安装在机架内主控单元或背板上，用于将控制信号、电源信号或传感器反馈信号进行集中管理和中转。其功能类似于一个“信号路由器”，是设备内部子系统互联的重要组件。
二、主要功能
| 功能分类 | 说明 |
|---|---|
| 信号中继与分配 | 接收来自主控板或PLC的控制信号，并分发到RF电源、真空泵、加热器、气体控制等子系统 |
| 信号整合 | 将各传感器（如温度、压力、气流等）的反馈信号汇总后传送给主控制器 |
| 电气隔离 | 内部集成光耦、电阻、电容等隔离电路，提升系统抗干扰能力 |
| 接口扩展 | 提供多通道输入/输出接口，方便系统功能扩展或后续升级 |
三、应用场景
Gasonics 90-1031-01 接口板广泛用于以下应用环境：
Gasonics 等离子体剥离机主控制系统
连接主控制器与RF电源、MFC、腔体加热器、报警灯等
信号汇总与系统调试
为设备工程模式提供I/O调试信号端口，方便快速排障
模块化系统构建
作为模块化接口平台，支持设备按需配置功能模块
英文资料：
The Gasonics 90-1031-01 Interface Board is a key signal relay module in the Gasonics plasma stripping equipment, used to connect the electrical signals between the main control system and various execution/detection sub modules, and achieve functions such as data communication, control signal distribution, and status feedback within the equipment.
1、 Product Overview
The Gasonics 90-1031-01 interface board is a signal interface module designed specifically for the Gasonics series plasma equipment. It is installed on the main control unit or backplane inside the rack and is used for centralized management and transfer of control signals, power signals, or sensor feedback signals. Its function is similar to a "signal router" and it is an important component for interconnecting subsystems within the device.
2、 Main functions
Functional classification description
Signal relay and distribution receive control signals from the main control board or PLC, and distribute them to subsystems such as RF power supply, vacuum pump, heater, gas control, etc
Signal integration consolidates the feedback signals from various sensors (such as temperature, pressure, airflow, etc.) and transmits them to the main controller
Internal integration of optocouplers, resistors, capacitors, and other isolation circuits for electrical isolation enhances the system's anti-interference capability
Interface extension provides multi-channel input/output interfaces, facilitating system function expansion or subsequent upgrades
3、 Application scenarios
The Gasonics 90-1031-01 interface board is widely used in the following application environments:
Main control system of Gasonics plasma stripping machine
Connect the main controller to the RF power supply MFC、 Chamber heater, alarm light, etc
Signal Summary and System Debugging
Provide I/O debugging signal ports for device engineering mode, facilitating quick troubleshooting
Modular system construction
As a modular interface platform, it supports on-demand configuration of functional modules for devices
2.产 品 展 示
3.其他产品
4.其他英文产品
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