Gasonics 95-2736电源控制器 PDF资料
1.产 品 资 料 介 绍：
Gasonics 95-2736 电源控制器 是一款用于 Gasonics 等离子体剥离设备中的专用电源管理模块，主要用于控制、分配、监测和保护等离子系统内部各关键子模块（如 RF 电源、真空泵、加热系统、MFC 等）的电力供应，确保设备运行的安全性和稳定性。
一、产品概述
Gasonics 95-2736 电源控制器（Power Controller）是安装于 Gasonics 剥离系统内部机架上的核心电源管理单元，负责对整机内的电源进行逻辑控制、断路保护、状态反馈和过程联锁。其编号“95-2736”是 Gasonics 原厂的标准部件号，广泛配套于 Aura、L3510、PEP 等系列机型。
二、核心功能
| 功能类型 | 描述 |
|---|---|
| 主电源开关控制 | 控制整机上电/断电逻辑，含手动或自动控制模式 |
| 各子系统电力分配 | 分别控制供电给 RF 模块、真空泵、气体系统、加热单元等 |
| 过载保护功能 | 检测电流过载、电压异常，自动断电并上报报警 |
| 联锁控制机制 | 与系统状态互锁，确保例如腔体未抽真空时 RF 电源不能开启 |
| 状态监控与反馈 | 实时输出运行/报警/断路等状态信号供主控板监控 |
三、应用场景
Gasonics 95-2736 电源控制器主要用于：
等离子体剥离设备电源管理中心
控制整机上电顺序、电源分组控制，保证模块按规范启动/关闭
半导体工艺中的安全联锁控制系统
确保如反应腔体未抽真空、温度异常时自动中断RF电源供电，避免设备损坏
设备维护与故障诊断
支持电源状态显示和诊断输出，便于技术人员排查问题
英文资料：
The Gasonics 95-2736 power controller is a specialized power management module used in Gasonics plasma stripping equipment. It is mainly used to control, distribute, monitor, and protect the power supply of key sub modules (such as RF power supply, vacuum pump, heating system, MFC, etc.) inside the plasma system, ensuring the safety and stability of equipment operation.
1、 Product Overview
The Gasonics 95-2736 Power Controller is a core power management unit installed on the internal rack of the Gasonics stripping system, responsible for logical control, circuit breaker protection, status feedback, and process interlocking of the power supply inside the entire machine. Its serial number "95-2736" is the standard part number of Gasonics original factory, widely matched with Aura, L3510, PEP and other series models.
2、 Core functions
Function type description
The main power switch controls the power on/off logic of the entire machine, including manual or automatic control modes
Each subsystem's power distribution controls the supply of power to RF modules, vacuum pumps, gas systems, heating units, etc
Overload protection function detects current overload and abnormal voltage, automatically cuts off power and reports an alarm
The interlocking control mechanism is interlocked with the system status to ensure that, for example, the RF power supply cannot be turned on when the cavity is not evacuated
Real time output of status monitoring and feedback signals such as operation/alarm/circuit breaker for monitoring by the main control board
3、 Application scenarios
The Gasonics 95-2736 power controller is mainly used for:
Power Management Center for Plasma Stripping Equipment
Control the power on sequence and power grouping of the entire machine to ensure that modules start/stop according to specifications
Safety interlock control system in semiconductor technology
Ensure that the RF power supply is automatically interrupted if the reaction chamber is not evacuated or if the temperature is abnormal, to avoid equipment damage
Equipment maintenance and fault diagnosis
Support power status display and diagnostic output, making it easy for technicians to troubleshoot problems
2.产 品 展 示
3.其他产品
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