Gasonics 11070-2控制器模块 PDF资料
1.产 品 资 料 介 绍：
Gasonics 11070-2 控制器模块 是 Gasonics 等离子体剥离系统中的一个关键电子控制单元，负责设备中某一子系统或多项运行功能的集中控制与信号处理，常用于控制等离子体功率、气体流量、真空状态或过程时序等。
一、产品概述
Gasonics 11070-2 控制器模块是一种高度集成的功能控制电路板（Controller Board），其作用是作为等离子体剥离设备的中枢神经，用于处理输入/输出信号、控制执行部件、接收传感器反馈，以及与主系统通信协同运行。
其“11070-2”属于Gasonics的部件编号，说明该模块为标准控制类电子组件的一种具体配置或版本更新。
二、可能的技术功能（视设备配置而定）
| 控制功能类型 | 描述 |
|---|---|
| RF功率控制 | 调节等离子体反应腔的射频功率输出，用于维持等离子密度稳定 |
| 气体流量调节 | 控制质量流量计（MFC），确保等离子反应所需气体稳定供应 |
| 真空/压力调控 | 管理腔体真空泵、阀门状态，实现快速抽气和稳定反应压力 |
| 时序逻辑控制 | 按照设定流程步骤控制各子模块按顺序运行（如上片→处理→下片） |
| 安全与报警管理 | 检测系统状态，输出报警信号（如RF异常、温度异常） |
英文资料：
The Gasonics 11070-2 controller module is a key electronic control unit in the Gasonics plasma stripping system, responsible for centralized control and signal processing of a subsystem or multiple operating functions in the equipment. It is commonly used to control plasma power, gas flow rate, vacuum state, or process timing.
1、 Product Overview
The Gasonics 11070-2 controller module is a highly integrated functional control circuit board that serves as the central nervous system for plasma stripping equipment. It is used to process input/output signals, control execution components, receive sensor feedback, and communicate with the main system for coordinated operation.
Its part number "11070-2" belongs to Gasonics, indicating that this module is a specific configuration or version update of standard control electronic components.
2、 Possible technical features (depending on device configuration)
Description of Control Function Types
RF power control adjusts the RF power output of the plasma reaction chamber to maintain stable plasma density
Gas flow regulation control mass flow meter (MFC) ensures stable supply of gas required for plasma reaction
Vacuum/pressure regulation management chamber vacuum pump and valve status, achieving rapid pumping and stable reaction pressure
Sequential logic control controls each submodule to run in sequence according to the set process steps (from top to bottom)
Security and alarm management detection system status, output alarm signals (such as RF abnormality, temperature abnormality)
2.产 品 展 示
3.其他产品
KOLLMORGEN CB06561 PRD-B040SSLZ-62 伺服驱动器
4.其他英文产品
Siemens 6ES7307-1EA01-0AA0 power module
| IC3600PTJA4A | 531X189LTBAJG1 | IC3600EPSM1 |
| IC3600PTJA4 | 531X189LTBAHG1 | IC3600EPSK2 |
| IC3600PSZA1 | 531X187VCTADG1 | IC3600EPSK1 |
| IC3600PCZA1 | 531X187VCTABH1 | IC3600EPSH1D |
| IC3600LTGA1 | 531X187VCTABG1 | IC3600EPSH1B1E |
| IC3600LTDA1C | 531X186CPSAGG1 | IC3600EPSH1B1 |
