Gasonics AWD-D-1-0-021-004控制模块 PDF资料
1.产 品 资 料 介 绍：
Gasonics AWD-D-1-0-021-004 控制模块 是用于 Gasonics 等离子体剥离设备中的关键电子控制单元，主要负责系统内部某一功能子系统的精确控制，如气体流量、电源管理、真空控制或温控等。该模块在等离子清洗或剥离系统中扮演着核心信号处理和执行控制的角色。
一、产品概述
Gasonics AWD-D-1-0-021-004 控制模块是一个集成式工业控制板或控制单元，可能嵌入于设备主控系统内部，用于控制某一具体功能区块。该编号形式（AWD-D-1-0-021-004）符合 Gasonics 内部部件编码规范，表明其属于AWD（可能代表某一功能域或控制架构）系列模块中的第021号子模块。
二、技术功能（可能实现的控制功能）
由于该模块为专用控制单元，常见控制功能包括：
等离子体电源控制
管理RF电源的开关、功率调节、保护联锁等
气体流量控制
控制 MFC（质量流量控制器）的指令输出，精准调节反应气体混合比例
真空泵系统控制
控制真空泵启动/停止、腔体压力调节阀等
温度/加热管理
对腔体、载片台等加热区域进行温控设定及过温保护
信号处理与通讯
接收传感器反馈信号，向主控系统上传状态信息
英文资料：
The Gasonics AWD-D-1-0-021-004 control module is a key electronic control unit used in Gasonics plasma stripping equipment, mainly responsible for precise control of a functional subsystem within the system, such as gas flow rate, power management, vacuum control, or temperature control. This module plays a core role in signal processing and execution control in plasma cleaning or stripping systems.
1、 Product Overview
The Gasonics AWD-D-1-0-021-004 control module is an integrated industrial control board or control unit that may be embedded within the equipment control system to control a specific functional block. This numbering format (AWD-D-1-0-021-004) complies with the Gasonics internal component coding specification, indicating that it belongs to submodule 021 of the AWD (which may represent a functional domain or control architecture) series of modules.
2、 Technical functions (possible control functions)
As this module is a dedicated control unit, common control functions include:
Plasma power control
Manage RF power switches, power regulation, protection interlocks, etc
Gas flow control
Control the command output of MFC (Mass Flow Controller) to accurately adjust the mixing ratio of reaction gases
Vacuum pump system control
Control the start/stop of vacuum pump, chamber pressure regulating valve, etc
Temperature/Heating Management
Set temperature control and over temperature protection for heating areas such as chambers and slide tables
Signal Processing and Communication
Receive sensor feedback signals and upload status information to the main control system
2.产 品 展 示
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