Gasonics 27-169988-00微波发电机 PDF资料
1.产 品 资 料 介 绍：
产品概述
Gasonics 27-169988-00 是一款高性能微波发电机，主要用于提供稳定、高效的微波能量输出，支持多种工业和科研设备中的微波加热与处理需求。
应用领域
半导体制造
用于等离子刻蚀、化学气相沉积（CVD）等工艺中微波能量的提供，确保工艺稳定和产品质量。
在晶圆清洗和薄膜沉积过程中实现均匀加热。
表面处理
金属、陶瓷及复合材料的表面硬化、改性和涂层沉积。
提高材料表面性能，如耐磨性、抗腐蚀性。
医疗设备
用于医疗设备中的微波消毒和杀菌。
在某些物理治疗设备中提供微波能量。
材料科学研究
材料微波加热反应研究。
高温合成、分解反应的能量供应。
食品加工
微波干燥、杀菌处理。
保持食品营养和口感。
工业加热与干燥
塑料、橡胶、纺织品等材料的快速加热和固化。
降低能耗，提高生产效率。
英文资料：
product overview
Gasonics 27-169988-00 is a high-performance microwave generator primarily designed to provide stable and efficient microwave energy output, supporting microwave heating and processing needs in various industrial and scientific equipment.
application area
Semiconductor Manufacturing
Used to provide microwave energy in processes such as plasma etching and chemical vapor deposition (CVD), ensuring process stability and product quality.
Realize uniform heating during wafer cleaning and thin film deposition processes.
Surface Treatment
Surface hardening, modification, and coating deposition of metals, ceramics, and composite materials.
Improve the surface properties of materials, such as wear resistance and corrosion resistance.
medical equipment
Used for microwave disinfection and sterilization in medical equipment.
Provide microwave energy in certain physical therapy devices.
material science
Research on Microwave Heating Reaction of Materials.
Energy supply for high-temperature synthesis and decomposition reactions.
food processing
Microwave drying and sterilization treatment.
Maintain the nutrition and taste of food.
Industrial heating and drying
Rapid heating and curing of materials such as plastics, rubber, textiles, etc.
Reduce energy consumption and improve production efficiency.
2.产 品 展 示
3.其他产品
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