Gasonics 853-1600-001机器人手臂组件 PDF资料
1.产 品 资 料 介 绍：
产品名称
Gasonics 853-1600-001 机器人手臂组件
产品概述
Gasonics 853-1600-001 是 Gasonics 等离子体处理设备中使用的机器人手臂组件，通常作为完整机器人套件的一部分，如 A94-062-01。该组件由 Hine Design 生产，型号为 853-2493-001，包含机械臂、Theta 电路板、末端执行器和连接电缆。该套件为全新库存件，适用于设备的维护和升级。
技术规格（典型）
机械臂型号：Theta Arm（型号 853-2493-001）
电路板型号：Theta Board，型号 778-21
末端执行器：Theta End Effector
连接电缆：Theta Cables
安装方式：模块化设计，便于集成于设备中
兼容性：与 Gasonics 等离子体处理设备高度兼容
应用领域
等离子体清洗与剥离设备
在 Gasonics 等离子体处理设备中，853-1600-001 机器人手臂组件用于晶圆的自动搬运和处理，确保工艺的自动化和高效性。设备维护与升级
作为关键替换组件，用于替换老化或损坏的机器人单元，保障设备持续稳定运行。实验室和研发环境
在实验室和研发环境中，为等离子体处理设备提供必要的机器人支持，满足不同实验需求。
产品优势
高稳定性：提供稳定的机械臂运动，确保设备的正常运行。
兼容性强：与 Gasonics 等离子体处理设备高度兼容，易于安装和替换。
结构紧凑：设计紧凑，占用空间小，适合各种设备配置。
可靠性高：采用高质量组件，具有较长的使用寿命和较低的故障率。
英文资料：
product name
Gasonics 853-1600-001 Robot Arm Component
product overview
Gasonics 853-1600-001 is a robotic arm component used in Gasonics plasma processing equipment, typically as part of a complete robot kit, such as A94-062-01. This component is produced by Hine Design, model 853-2493-001, and includes a robotic arm, Theta circuit board, end effector, and connecting cable. This kit is a brand new inventory item suitable for equipment maintenance and upgrades.
Technical specifications (typical)
Robot arm model: Theta Arm (model 853-2493-001)
Circuit board model: Theta Board, model 778-21
End effector: Theta End effector
Connecting cables: Theta Cables
Installation method: Modular design, easy to integrate into the device
Compatibility: Highly compatible with Gasonics plasma processing equipment
application area
Plasma cleaning and stripping equipment
In Gasonics plasma processing equipment, the 853-1600-001 robotic arm component is used for automatic wafer handling and processing, ensuring process automation and efficiency.
Equipment maintenance and upgrade
As a key replacement component, it is used to replace aging or damaged robot units, ensuring the continuous and stable operation of the equipment.
Laboratory and R&D environment
Provide necessary robot support for plasma processing equipment in laboratories and research and development environments to meet different experimental needs.
Product advantages
High stability: Provides stable movement of the robotic arm to ensure the normal operation of the equipment.
Strong compatibility: Highly compatible with Gasonics plasma processing equipment, easy to install and replace.
Compact structure: Compact design, small footprint, suitable for various device configurations.
High reliability: using high-quality components, with a long service life and low failure rate.
2.产 品 展 示
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