Gasonics PEP-3600气动控制器 PDF资料
1.产 品 资 料 介 绍：
产品名称
Gasonics PEP-3600 气动控制器
产品概述
Gasonics PEP-3600 是一款用于半导体制造设备的气动控制器，型号为 95-3047。
技术规格（典型）
输入电压：适配 Gasonics 设备的电源要求
控制方式：气动控制
安装方式：模块化设计，便于集成于设备中
兼容性：与 Gasonics 等离子体处理设备高度兼容
应用领域
等离子体清洗与剥离设备
在 Gasonics 等离子体处理设备中，PEP-3600 气动控制器用于精确控制气体流量和压力，确保等离子体工艺的稳定性和一致性。设备维护与升级
用于替换原有的气动控制模块，提升设备的稳定性和可靠性，延长设备的使用寿命。实验室和研发环境
在实验室和研发环境中，为等离子体处理设备提供必要的气动控制支持，满足不同实验需求。
产品优势
高稳定性：提供稳定的气动控制，确保设备的正常运行。
兼容性强：与 Gasonics 等离子体处理设备高度兼容，易于安装和替换。
结构紧凑：设计紧凑，占用空间小，适合各种设备配置。
可靠性高：采用高质量组件，具有较长的使用寿命和较低的故障率。
英文资料：
product name
Gasonics PEP-3600 Pneumatic Controller
product overview
Gasonics PEP-3600 is a pneumatic controller for semiconductor manufacturing equipment, model 95-3047.
Technical specifications (typical)
Input voltage: adapted to the power requirements of Gasonics equipment
Control mode: Pneumatic control
Installation method: Modular design, easy to integrate into the device
Compatibility: Highly compatible with Gasonics plasma processing equipment
application area
Plasma cleaning and stripping equipment
In Gasonics plasma processing equipment, the PEP-3600 pneumatic controller is used to accurately control gas flow and pressure, ensuring the stability and consistency of the plasma process.
Equipment maintenance and upgrade
Used to replace the original pneumatic control module, improve the stability and reliability of the equipment, and extend the service life of the equipment.
Laboratory and R&D environment
Provide necessary aerodynamic control support for plasma processing equipment in laboratories and research and development environments to meet different experimental needs.
Product advantages
High stability: Provides stable pneumatic control to ensure the normal operation of the equipment.
Strong compatibility: Highly compatible with Gasonics plasma processing equipment, easy to install and replace.
Compact structure: Compact design, small footprint, suitable for various device configurations.
High reliability: using high-quality components, with a long service life and low failure rate.
2.产 品 展 示
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