Tokyo Electron 3281-000019-15传感器组件 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Tokyo Electron (TEL) 3281-000019-15 传感器组件 — 产品应用领域详解
一、产品功能定位
3281-000019-15 传感器组件 是 Tokyo Electron（TEL）半导体设备中用于实时监测设备状态或工艺参数的关键检测模块。此类组件通常结合高精度传感器、电路板、外壳及通信接口组成，用于采集环境或设备内部特定物理量，为控制系统提供反馈数据，实现闭环控制与异常预警。
二、主要应用领域
1. 关键工艺参数实时监测
典型监测对象（根据组件编号推测）：
温度（热电偶或RTD）
压力（真空腔体、气路）
位移/位置（机械臂、升降装置）
气体流量或气氛检测（MFC旁路或传输路径）
设备类型：
薄膜沉积设备（CVD、ALD、PVD）
晶圆清洗设备、显影系统
刻蚀设备（Etcher）
晶圆搬运系统、Transfer Modules
2. 过程控制闭环反馈单元
功能特点：
将采集到的信号通过模拟或数字方式传输给控制器模块（如 3M81 系列控制板）；
与执行机构（如电磁阀、加热器、电机等）形成闭环系统，实现精准控制；
可联动报警与保护机制，在异常状态下快速响应停机或切断电源。
英文资料：
Tokyo Electron (TEL) 3281-000019-15 Sensor Components - Product Application Field Detailed Explanation
1、 Product functional positioning
The 3281-000019-15 sensor component is a key detection module used in Tokyo Electron (TEL) semiconductor equipment for real-time monitoring of equipment status or process parameters. This type of component is usually composed of high-precision sensors, circuit boards, casings, and communication interfaces, used to collect specific physical quantities inside the environment or equipment, provide feedback data for the control system, and achieve closed-loop control and abnormal warning.
2、 Main application areas
1. Real time monitoring of key process parameters
Typical monitoring objects (inferred based on component numbers):
Temperature (thermocouple or RTD)
Pressure (vacuum chamber, gas path)
Displacement/position (robotic arm, lifting device)
Gas flow or atmosphere detection (MFC bypass or transmission path)
Equipment type:
Thin film deposition equipment (CVD, ALD, PVD)
Wafer cleaning equipment, developing system
Etcher equipment
Wafer handling system Transfer Modules
2. Process control closed-loop feedback unit
Functional features:
Transmit the collected signals to the controller module (such as the 3M81 series control board) through analog or digital means;
Form a closed-loop system with executing agencies (such as solenoid valves, heaters, motors, etc.) to achieve precise control;
It can be linked with alarm and protection mechanisms to quickly respond to shutdown or power cut off in abnormal states.
2.产 品 展 示
3.其他产品
ABB PL810P 3BDH000311R0101 电源链接模块
4.其他英文产品
ASEA 57360001-AN circuit board
LAM 810-800081-016 CPU motherb
Siemens 6ES7291-8GC00-0XA0 cartridge
| 296PLUS-DO-100P-120 | SA602-001-01 | IC3600SVZD1 |
| 281-600678 | S60100-NA | IC3600SVZC1 |
| 281-600243-1 | 52010-60 | IC3600SVZB1 |
| 281-600233-3 | PS-3306I-E-C104 | IC3600SVZA1C |
| 281-600120 | SM602-001 | IC3600SVZA1 |
| 281-500198-3 | PRD-P303250D-35 | IC3600SVSE1H1D |
