Tokyo Electron 3Z89-000012-11 电源机架 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Tokyo Electron (TEL) 3Z89-000012-11 电源机架 — 产品应用领域详解
一、产品功能定位
3Z89-000012-11 电源机架是 Tokyo Electron 半导体设备中用于集中供电、配电与电源模块集成的核心子系统。它为整机控制系统、驱动模块、传感器单元等提供稳定、安全的电源环境，并具有良好的电磁隔离与模块化支持能力。
二、主要应用领域
1. 半导体制造设备的电源管理核心
适用设备类型：
光刻机（Lithography）
刻蚀机（Etcher）
CVD/PVD 薄膜沉积系统
晶圆清洗与处理设备
主要任务：
集成多组电源模块（如 DC、AC/DC 转换、电压稳压等）
提供多路稳定电源（如 5V、12V、24V、48V）输出
支持冗余配置与热插拔维护
2. 设备内部多模块供电平台
集中供电：统一为控制器、接口板、传感器模块、驱动器等子系统提供所需电源；
多电压输出：满足不同控制单元的工作电压要求，简化布线结构；
功率分配与保护：带有熔断器、电流保护、过压/过热保护机制，保障系统安全运行。
英文资料：
Tokyo Electron (TEL) 3Z89-000012-11 Power Rack - Product Application Field Detailed Explanation
1、 Product functional positioning
The 3Z89-000012-11 power rack is a core subsystem used for centralized power supply, distribution, and power module integration in Tokyo Electron semiconductor equipment. It provides a stable and safe power environment for the overall control system, drive module, sensor unit, etc., and has good electromagnetic isolation and modular support capabilities.
2、 Main application areas
1. Power management core of semiconductor manufacturing equipment
Applicable device types:
Lithography machine
Etcher (Etcher)
CVD/PVD thin film deposition system
Wafer cleaning and processing equipment
Main tasks:
Integrate multiple power modules (such as DC, AC/DC conversion, voltage stabilization, etc.)
Provide multiple stable power sources (such as 5V, 12V, 24V, 48V) for output
Support redundant configuration and hot swappable maintenance
2. Multi module power supply platform inside the device
Centralized power supply: providing the required power supply for subsystems such as controllers, interface boards, sensor modules, drivers, etc. in a unified manner;
Multi voltage output: meets the working voltage requirements of different control units and simplifies the wiring structure;
Power allocation and protection: equipped with fuses, current protection, and overvoltage/overheating protection mechanisms to ensure the safe operation of the system.
2.产 品 展 示
3.其他产品
ABB GJR5251200R0202 07AI90-S D2 分析输入单元
ABB UFC933A102 3BHE048062R0102 电路板
4.其他英文产品
NI PCI4451 Data Acquisition Card
Emerson P144.R4 Intelligent I/O Board
ABB XVC768117 Field Input/Output Module
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