Tokyo Electron 3880-200061-12温度控制器 PDF资料 

1.产 品 资 料 介 绍：

中文资料：

okyo Electron (TEL) 3880-200061-12 温度控制器 — 产品应用领域详解

1. 半导体制造设备中的温度精准控制

• 核心功能：该温度控制器专为半导体制造设备设计，精确调节工艺环境温度，保证关键工艺环节如光刻、刻蚀、沉积过程的温度稳定性。

• 重要意义：温度的微小波动会直接影响产品良率和一致性，该控制器有效保障工艺参数的稳定性。

• 典型应用：晶圆处理模块、薄膜沉积设备、光刻机等关键设备的温控系统。

2. 自动化生产线中的温度管理

• 实时监控：实时采集和调节设备温度数据，确保温度处于设定范围内，避免因温度异常导致的生产中断。

• 高效运行：帮助自动化生产线实现连续、稳定作业，减少设备故障率。

• 应用场景：半导体晶圆制造的自动化搬运系统及辅助设备。

3. 设备热管理系统的重要组成

• 散热调节：通过精准的温度控制防止设备过热，保障内部电子元件和机械部件的正常工作。

• 提升寿命：合理控制设备温度，有效延长设备整体使用寿命。

• 典型设备：高功率驱动单元、激光系统、感应加热模块等。

4. 高精度制造过程中的温度稳定保障

• 保证产品一致性：精准的温度控制避免因热膨胀、温差引起的尺寸变化，确保产品加工的高精度和一致性。

• 提升良率：稳定的温度环境减少缺陷率，提升整体生产效率和产品质量。

• 应用领域：高端微电子制造及精密仪器制造等领域。

英文资料：

Okyo Electron (TEL) 3880-200061-12 Temperature Controller - Product Application Field Detailed Explanation

1. Precise temperature control in semiconductor manufacturing equipment

Core function: This temperature controller is designed specifically for semiconductor manufacturing equipment, accurately adjusting the temperature of the process environment to ensure temperature stability in key process steps such as photolithography, etching, and deposition processes.

Significance: Small fluctuations in temperature can directly affect product yield and consistency, and this controller effectively ensures the stability of process parameters.

Typical applications: Temperature control systems for key equipment such as wafer processing modules, thin film deposition equipment, and lithography machines.

2. Temperature management in automated production lines

Real time monitoring: Real time collection and adjustment of equipment temperature data to ensure that the temperature is within the set range, avoiding production interruptions caused by abnormal temperature.

Efficient operation: Helps automated production lines achieve continuous and stable operations, reducing equipment failure rates.

Application scenario: Automated handling system and auxiliary equipment for semiconductor wafer manufacturing.

3. Important components of equipment thermal management system

Heat dissipation regulation: By precise temperature control, equipment overheating is prevented, ensuring the normal operation of internal electronic components and mechanical parts.

Improve lifespan: Reasonably control equipment temperature to effectively extend the overall service life of the equipment.

Typical equipment: high-power drive unit, laser system, induction heating module, etc.

4. Temperature stability guarantee during high-precision manufacturing process

Ensure product consistency: Accurate temperature control avoids dimensional changes caused by thermal expansion and temperature differences, ensuring high precision and consistency in product processing.

Improve yield: A stable temperature environment reduces defect rates, enhances overall production efficiency and product quality.

Application areas: high-end microelectronics manufacturing and precision instrument manufacturing.

2.产      品      展      示      

3.其他产品

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KOLLMORGEN CP310250 PRD-P310250Z-55  伺服驱动器

ABB 1TGE120011R2200 电机馈线控制单元

4.其他英文产品

CI871AK01 3BSE092693R1 interface module

VE5010 Logic Controller Module

KJ3222X1-BA1 Analog Input Module

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs

品牌：TEL Tokyo Electron

型号：3880-200061-12温度控制器

质保：一年

成色：全新/二手

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特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

应用行业：广泛应用于冶金、石油天然气、玻璃制造业、铝业、石油化工、煤矿、造纸印刷、纺织印染、机械、电子制造、汽车制造、烟草、塑胶机械、电力、水利、水处理/环保、市政工程、锅炉供暖、能源、输配电等

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