Tokyo Electron CS1B85-372049-W1电机冲击模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Tokyo Electron (TEL) CS1B85-372049-W1 电机冲击模块 — 产品应用领域详解
1. 半导体制造设备中的晶圆传输系统
关键作用：该模块在晶圆传输过程中，负责调节电机启动和停止时的冲击力度，确保晶圆平稳移动。
应用价值：防止传输中因冲击或震动导致的晶圆位移、破损或位置偏差，保障晶圆的完整性和后续工艺的稳定性。
典型场景：晶圆搬运机器人、传送带启动/停止控制、输送机构的减震优化等。
2. 自动化机械运动控制
动态调节：该模块通过控制电机冲击，优化机械臂或输送系统的启动与停止过程。
效果提升：有效降低机械系统的震动和冲击，提升设备的运行平稳性与重复定位精度。
应用示例：自动化装载机、精密机械手臂、电机驱动的输送装置等。
3. 设备振动抑制与性能优化
振动缓冲：通过精确控制电机冲击力，减少机械冲击带来的振动，保护设备内部敏感部件。
延长寿命：有效避免因冲击频繁造成的机械疲劳和损伤，延长设备使用寿命。
维护便利：降低故障率，减少维修频次和停机时间，提升生产线稼动率。
4. 高精度定位系统支持
动作平稳：在晶圆装载、卸载及搬运环节，保证动作柔和稳定，避免定位误差。
工艺保障：稳定的定位支持高精度工艺执行，提升产品良率。
应用环境：微细加工设备、光刻机、刻蚀设备等需要高精度机械定位的场合。
英文资料：
Tokyo Electron (TEL) CS1B85-372049-W1 Motor Shock Module - Product Application Field Detailed Explanation
1. Wafer transfer system in semiconductor manufacturing equipment
Key role: This module is responsible for adjusting the impact force during the start and stop of the motor during wafer transfer, ensuring smooth movement of the wafer.
Application value: To prevent wafer displacement, damage, or positional deviation caused by impact or vibration during transmission, ensuring the integrity of the wafer and the stability of subsequent processes.
Typical scenarios: wafer handling robots, conveyor belt start/stop control, shock absorption optimization of conveying mechanisms, etc.
2. Automated mechanical motion control
Dynamic adjustment: This module optimizes the start and stop process of the robotic arm or conveyor system by controlling the motor impact.
Effect improvement: Effectively reduce the vibration and impact of the mechanical system, improve the smooth operation and repeated positioning accuracy of the equipment.
Application examples: Automated loaders, precision robotic arms, motor-driven conveyors, etc.
3. Equipment vibration suppression and performance optimization
Vibration buffering: By precisely controlling the impact force of the motor, the vibration caused by mechanical impact is reduced, and sensitive components inside the equipment are protected.
Extend lifespan: Effectively avoid mechanical fatigue and damage caused by frequent impacts, and extend the service life of equipment.
Easy maintenance: reduce failure rate, minimize maintenance frequency and downtime, and improve production line utilization rate.
4. High precision positioning system support
Smooth operation: Ensure smooth and stable operation during wafer loading, unloading, and handling to avoid positioning errors.
Process assurance: Stable positioning supports high-precision process execution, improving product yield.
Application environment: In situations where high-precision mechanical positioning is required, such as microfabrication equipment, lithography machines, etching equipment, etc.
2.产 品 展 示
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| 565-5-5-O-A-E | 6SC6110-0GA00 | INMMP11 |
