Tokyo Electron 2981-600595-11接口板 PDF资料
1.产 品 资 料 介 绍:
中文资料:
产品名称
TEL Tokyo Electron 2981-600595-11 接口板
产品类型
连接接口板(Interface Board),又称“Conn CT SSR #01”。
功能用途
该接口板主要用于 Tokyo Electron 的半导体设备中,执行以下功能:
连接控制系统与外部设备(如固态继电器 SSR)
作为控制信号、电源线路的中转通道
支持信号耦合、逻辑接口转换或触发输出功能
应用于清洗系统、光刻机(Litho)、ACT-12 工艺模块等设备中
应用设备
ACT-12 Clean Track 系统
Lithography(光刻设备)
其他需要 SSR 控制的 Tokyo Electron 工艺设备
英文资料:
product name
TEL Tokyo Electron 2981-600595-11 Interface Board
product type
Interface Board, also known as "Conn CT SSR # 01".
Functional purpose
This interface board is mainly used in Tokyo Electron's semiconductor equipment to perform the following functions:
Connect the control system with external devices (such as solid-state relays SSR)
As a transfer channel for control signals and power lines
Support signal coupling, logic interface conversion, or trigger output function
Applied in cleaning systems, lithography machines (Litho), ACT-12 process modules and other equipment
Application device
ACT-12 Clean Track System
Lithography (lithography equipment)
Other Tokyo Electron process equipment requiring SSR control
2.产 品 展 示
3.其他产品
Kollmorgen MMC-SD-0.5-230-D伺服驱动器
4.其他英文产品
DELTA TAU ACC-24E2 interface simulation
ALSTOM 3EST125-975 DCC2382A Control Pane
Asea 2668-184-280 12 slot control board
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