Tokyo Electron E244-000058-11数字量控制板卡 PDF资料
1.产 品 资 料 介 绍:
中文资料:
产品名称:E244-000058-11 数字量控制板卡
制造商:Tokyo Electron Ltd.(东京电子)
产品类型:数字量 I/O 控制板卡(Digital I/O Control Board)
一、产品概述
E244-000058-11 是 Tokyo Electron 半导体设备中的一款数字量输入/输出控制板,主要用于采集来自设备各处的开关状态信号,并控制电磁阀、继电器、灯指示等数字执行元件。它作为控制系统的关键 I/O 接口,实现系统的逻辑响应和设备联动。
二、核心功能
数字输入采集
采集来自传感器、限位开关、按钮等的开关量信号,作为系统控制的判断依据。
数字输出控制
通过输出开关信号,控制执行器件如电磁阀、信号灯、继电器等部件的启停。
电气隔离与保护
输入输出通道带隔离电路设计,提高抗干扰能力并保护主控系统安全。
模块化通信
与主控 CPU 或 PLC 系统通过背板总线或串行接口通讯,实现指令响应。
三、典型应用范围
此板卡被广泛应用于 TEL 各类半导体设备中的:
真空腔体的门控系统
气体阀阵控制模块
机械臂、升降装置限位控制
报警与安全互锁系统
设备状态指示灯、蜂鸣器控制单元
英文资料:
Product Name: E244-000058-11 Digital Control Board
Manufacturer: Tokyo Electron Ltd
Product type: Digital I/O Control Board
1、 Product Overview
E244-000058-11 is a digital input/output control board in Tokyo Electron semiconductor equipment, mainly used to collect switch status signals from various parts of the equipment and control digital actuators such as solenoid valves, relays, and light indicators. It serves as a key I/O interface for the control system, enabling logical response and device linkage of the system.
2、 Core functions
Digital input acquisition
Collect switch signals from sensors, limit switches, buttons, etc. as the basis for system control judgment.
Digital output control
By outputting switch signals, control the start and stop of components such as solenoid valves, signal lights, relays, etc.
Electrical isolation and protection
The input and output channels are designed with isolation circuits to improve anti-interference ability and protect the safety of the main control system.
Modular communication
Communicate with the main control CPU or PLC system through backplane bus or serial interface to achieve instruction response.
3、 Typical application scope
This board is widely used in various semiconductor devices of TEL:
Gate control system for vacuum chamber
Gas valve array control module
Mechanical arm, lifting device limit control
Alarm and safety interlock system
Equipment status indicator light, buzzer control unit
2.产 品 展 示
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