Tokyo Electron 3208-000147-11输入/输出接口模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品名称：3208-000147-11 输入/输出接口模块（I/O Interface Module）
制造商：Tokyo Electron Ltd.（东京电子）
产品类型：输入/输出接口模块
一、产品概述
3208-000147-11 是 Tokyo Electron 半导体设备中用于连接和管理各种数字和模拟信号的输入输出接口模块。该模块负责将外部设备的信号输入转换为系统可识别的格式，或将系统控制信号输出给执行器、指示灯等外部设备。
二、主要功能
多通道输入信号采集
支持数字量和模拟量信号的采集，如开关状态、传感器数据、位置反馈等。
多通道输出信号控制
向电磁阀、马达、继电器、显示单元等执行部件发送控制信号。
信号隔离与保护
具备电气隔离功能，保护主控系统免受干扰和损坏，增强系统稳定性。
状态监测与诊断
可实时监测输入输出信号状态，支持故障检测与报警。
三、典型应用
该模块广泛应用于 Tokyo Electron 各类半导体制造设备的控制系统中，包括：
Etcher 蚀刻设备
CVD/PVD 薄膜沉积设备
涂胶显影设备（Coater/Developer）
晶圆搬运和自动化系统
真空与气体控制单元
英文资料：
Product Name: 3208-000147-11 I/O Interface Module
Manufacturer: Tokyo Electron Ltd
Product Type: Input/Output Interface Module
1、 Product Overview
3208-000147-11 is an input/output interface module used in Tokyo Electron semiconductor equipment to connect and manage various digital and analog signals. This module is responsible for converting the signal input of external devices into a format recognizable by the system, or outputting system control signals to external devices such as actuators and indicator lights.
2、 Main functions
Multi channel input signal acquisition
Support the acquisition of digital and analog signals, such as switch status, sensor data, position feedback, etc.
Multi channel output signal control
Send control signals to executing components such as solenoid valves, motors, relays, and display units.
Signal isolation and protection
Equipped with electrical isolation function, it protects the main control system from interference and damage, and enhances system stability.
Status monitoring and diagnosis
Real time monitoring of input and output signal status, supporting fault detection and alarm.
3、 Typical applications
This module is widely used in the control systems of various semiconductor manufacturing equipment at Tokyo Electron, including:
Etcher etching equipment
CVD/PVD thin film deposition equipment
Coater/Developer
Wafer handling and automation system
Vacuum and gas control unit
2.产 品 展 示
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| 4176J86-G01 | HG109A6 | PFEA 111, IP 65 |
| 4161J28-G03 | HZ40S202A6 | PFCL 201CD-10.0KN |
| 4145J42G1 | HM408A6 | 57160001-TZ DSTD110A ABB |
| 4145J42-G01 | P81010Z1200002 | PFCL 201CE-5.0KN |
| 4136J63G1 | HG96A603 | TRICONEX 3664 |
| 4136J63-G01 | SS7PG-48BMC | IMDSI22 |
| 40PA60-36-37-TEFC-G | HG932A6 | IMDSM04 |
