Tokyo Electron 2L12-000177-12控制单元 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品名称：2L12-000177-12 控制单元
制造商：Tokyo Electron Ltd.（东京电子）
产品类型：控制单元模块（Control Unit）
一、产品概述
2L12-000177-12 是 Tokyo Electron 半导体设备中用于特定功能模块的控制单元，负责子系统（如温控、搬运、真空、阀门、电源等）的自动控制、信号处理与数据交互，是设备实现精准工艺执行的重要组成部分。
二、核心功能
子系统控制核心
管理并协调本地子系统的各个功能部件，例如控制电机启停、阀门开关、温度调节等。
信号采集与处理
支持模拟和数字信号的采集、滤波、判断和响应，用于控制逻辑的实时处理。
通信接口
与主控系统通信，传输运行状态、传感数据及报警信息，可能通过 RS-232、CAN、I/O 总线或 TEL 专用接口协议。
异常监测与保护
对控制对象运行状况进行实时监控，支持异常检测、超限保护和报警反馈。
三、典型应用范围
该控制单元适用于 TEL 设备中以下系统模块控制：
晶圆搬送系统（如 EFEM、Loadport、Aligner）
真空腔体控制单元
气体输送系统、气阀阵列控制
温控系统（加热模块、热板等）
CVD、PVD、Etcher、Developer 等设备内的功能区单元
英文资料：
Product Name: 2L12-000177-12 Control Unit
Manufacturer: Tokyo Electron Ltd
Product Type: Control Unit Module
1、 Product Overview
2L12-000177-12 is a control unit used for specific functional modules in Tokyo Electron semiconductor equipment, responsible for automatic control, signal processing, and data exchange of subsystems such as temperature control, handling, vacuum, valves, power supply, etc. It is an important component of the equipment to achieve precise process execution.
2、 Core functions
Subsystem Control Core
Manage and coordinate various functional components of the local subsystem, such as controlling motor start stop, valve switching, temperature regulation, etc.
Signal acquisition and processing
Support the acquisition, filtering, judgment, and response of analog and digital signals for real-time processing of control logic.
communication interface
Communicate with the main control system, transmit operating status, sensor data, and alarm information, possibly through RS-232, CAN, I/O bus, or TEL dedicated interface protocol.
Abnormal monitoring and protection
Real time monitoring of the operating status of control objects, supporting anomaly detection, over limit protection, and alarm feedback.
3、 Typical application scope
This control unit is suitable for controlling the following system modules in TEL equipment:
Wafer handling systems (such as EFEM, Loadport, Aligner)
Vacuum chamber control unit
Gas delivery system, valve array control
Temperature control system (heating module, hot plate, etc.)
Functional area units in CVD, PVD, Etcher, Developer and other equipment
2.产 品 展 示
3.其他产品
ABB TVB-1202-1ANET 1381-647980-12 电路板模块
4.其他英文产品
AMAT 0190-66253 Communication Module
IC3600SVZB1 Computer Adjustmen
| 5330 | 531X102CCHAFM2 | INIIT03 |
| 5310 | 193X804ABG01 | IMPCC01 |
| 5240-006 | 6DD1683-0CC5 | IMHHS03 |
| 5240 | 531X111PSHAFG2 | IMDSO01 |
| 5230 | 531X121PCRAGG3 | IMEC11 |
| 5220 | 03-169460-00 | IMRI002 |
