Tokyo Electron 5044-000158-11控制器模块 PDF资料
1.产 品 资 料 介 绍:
中文资料:
产品名称:5044-000158-11 控制器模块
制造商:Tokyo Electron Ltd.(东京电子)
产品类型:设备控制器模块(Controller Module)
一、产品概述
5044-000158-11 是用于 Tokyo Electron 半导体制造设备中的专用控制器模块,通常担任子系统或某功能区的关键控制核心角色,具备信号采集、控制执行、数据通信及状态管理等多种功能,常用于实现自动化工艺流程中的闭环控制。
二、主要功能
逻辑控制功能
执行固定或可编程的控制逻辑,处理来自传感器、执行器或主控系统的控制信号。
数据采集与信号处理
接收并处理模拟或数字输入信号(如温度、压力、位置、开关状态等)。
执行器驱动
控制电磁阀、马达、加热单元等执行部件的动作,包括启停、调速、定位等功能。
通信功能
与主控制器、上位机或其他模块进行高速数据交换,接口形式可能包括 RS-232/485、以太网、CAN 总线等。
系统监控与故障报警
实时监测系统运行状态,提供 LED 或数字信号形式的报警输出。
三、典型应用
该控制器模块适用于 TEL 以下设备的局部或单元控制:
Etcher(蚀刻机)
CVD / PVD(薄膜沉积)系统
Track 系统(涂胶/显影)
Load Lock / Transfer 模块
真空腔体控制、气阀控制、电源管理单元等
英文资料:
Product Name: 5044-000158-11 Controller Module
Manufacturer: Tokyo Electron Ltd
Product Type: Device Controller Module
1、 Product Overview
5044-000158-11 is a specialized controller module used in Tokyo Electron semiconductor manufacturing equipment, typically serving as a key control core for subsystems or functional areas. It has multiple functions such as signal acquisition, control execution, data communication, and status management, and is commonly used to achieve closed-loop control in automated process flows.
2、 Main functions
Logic control function
Execute fixed or programmable control logic to process control signals from sensors, actuators, or main control systems.
Data acquisition and signal processing
Receive and process analog or digital input signals (such as temperature, pressure, position, switch status, etc.).
Actuator driver
Control the actions of executing components such as solenoid valves, motors, and heating units, including functions such as start stop, speed regulation, and positioning.
communication function
High speed data exchange with the main controller, upper computer or other modules, interface forms may include RS-232/485, Ethernet, CAN bus, etc.
System monitoring and fault alarm
Real time monitoring of system operation status, providing alarm outputs in the form of LED or digital signals.
3、 Typical applications
This controller module is suitable for local or unit control of the following TEL devices:
Etcher (etching machine)
CVD/PVD (Thin Film Deposition) System
Track system (coating/developing)
Load Lock/Transfer module
Vacuum chamber control, air valve control, power management unit, etc
2.产 品 展 示
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