Tokyo Electron TF316925-006监管器 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、基本信息
产品型号：TF316925-006
产品名称：监管器（Controller 或 Regulator Module）
制造商：Tokyo Electron Ltd.（东京电子）
类别：工艺参数监控与调节模块
应用设备：广泛应用于 Tokyo Electron 的半导体制造设备，主要用于过程参数的实时调控与监测。
二、功能定位
过程参数监管
实时监控关键工艺参数，如气体流量、压力、温度、真空度等。
根据设定阈值自动调节相关设备部件（阀门、泵、加热器等），维持工艺稳定。
信号采集与反馈
收集来自传感器的模拟或数字信号，进行信号滤波与放大。
向主控制系统或上位机反馈实时状态与异常报警。
安全保护功能
设有报警和限制阈值，出现异常时执行联锁保护措施。
确保设备与工艺在安全范围内运行。
三、应用领域
半导体工艺设备
气体供应调节（如 MFC 质量流量控制器）
真空系统监控
腔体温度和压力调节
化学品供给系统监控和控制
工艺自动化系统
过程控制单元中的关键调节节点
英文资料：
1、 Basic Information
Product model: TF316925-006
Product Name: Controller or Regulator Module
Manufacturer: Tokyo Electron Ltd
Category: Process parameter monitoring and adjustment module
Application equipment: Widely used in semiconductor manufacturing equipment of Tokyo Electron, mainly for real-time control and monitoring of process parameters.
2、 Functional positioning
Process parameter supervision
Real time monitoring of key process parameters such as gas flow rate, pressure, temperature, vacuum degree, etc.
Automatically adjust relevant equipment components (valves, pumps, heaters, etc.) according to the set threshold to maintain process stability.
Signal acquisition and feedback
Collect analog or digital signals from sensors, filter and amplify the signals.
Feedback real-time status and abnormal alarms to the main control system or upper computer.
Safety protection function
There are alarm and limit thresholds, and interlock protection measures are implemented in case of abnormalities.
Ensure that equipment and processes operate within a safe range.
3、 Application Fields
Semiconductor process equipment
Gas supply regulation (such as MFC mass flow controller)
Vacuum system monitoring
Temperature and pressure regulation of the chamber
Monitoring and Control of Chemical Supply System
Process automation system
Key regulatory nodes in process control units
2.产 品 展 示
3.其他产品
Intelligent Instrumentation TM2500-001B 终端操作面板
4.其他英文产品
ABB UN0503a-P Digital Output Module
GESAS CAN-DCM digital amplifier module
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