Tokyo Electron FPC-T0074A-11风扇控制板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、基本信息
产品型号：FPC-T0074A-11
产品名称：风扇控制板（Fan Power Controller / Fan Control PCB）
制造商：Tokyo Electron Ltd.（东京电子）
部件类别：风扇驱动与监控电路板
适用设备：TEL 半导体设备中的冷却/热管理子系统（如 CVD、Etcher、Ashing 等设备）
二、功能定位
风扇运行控制
精确控制系统冷却风扇的启停、速度调节、运行逻辑等，确保设备内部温度维持在安全范围。
风扇电源分配
将系统主电源转换为风扇所需的低压直流电（如 12V 或 24V DC），并提供电源保护。
故障检测与告警
检测风扇的转速、运转状态、是否堵转等故障，并反馈至主控系统触发报警或保护动作。
系统热管理协同
与温度传感器、主控系统协同工作，根据温度动态调节风扇速度（PWM 控制或模拟调节）。
三、应用领域
设备散热子系统
用于 CVD、PVD、干法清洗（Ashing）等设备中，控制腔体风扇、控制板冷却风扇、电源风扇等运行。
密闭控制柜通风系统
控制设备内部电控柜、RF模块、电源区等封闭空间中的散热风扇。
温度关键部件热保护系统
如热交换器、冷却模块、气路/真空组件附近的冷却通风控制。
四、技术特点（典型）
多通道风扇控制输出，支持多个风扇并联或分区控制
支持 PWM（脉宽调制）或电压控制风速
实时转速反馈监测功能（带 Tach 信号输入）
电源保护功能：过流、过压、短路保护
板载状态指示灯（如风扇运行、故障、供电状态）
工业级 PCB 设计，具备高可靠性与耐热性能
英文资料：
1、 Basic Information
Product model: FPC-T0074A-11
Product Name: Fan Power Controller/Fan Control PCB
Manufacturer: Tokyo Electron Ltd
Component category: Fan drive and monitoring circuit board
Applicable equipment: Cooling/Thermal Management Subsystem in TEL Semiconductor Equipment (such as CVD, Etcher, Ashing, etc.)
2、 Functional positioning
Fan operation control
Accurately control the start stop, speed adjustment, and operation logic of the cooling fan system to ensure that the internal temperature of the equipment is maintained within a safe range.
Fan power distribution
Convert the main power supply of the system to the low-voltage direct current required by the fan (such as 12V or 24V DC) and provide power protection.
Fault detection and alarm
Detect faults such as fan speed, operating status, and blockage, and provide feedback to the main control system to trigger alarms or protective actions.
System thermal management collaboration
Collaborate with temperature sensors and the main control system to dynamically adjust fan speed based on temperature (PWM control or analog adjustment).
3、 Application Fields
Equipment cooling subsystem
Used in CVD, PVD, dry cleaning (Ashing) and other equipment to control the operation of chamber fans, control board cooling fans, power fans, etc.
Closed control cabinet ventilation system
Control the cooling fans in enclosed spaces such as electrical control cabinets, RF modules, and power supply areas inside the control equipment.
Temperature critical component thermal protection system
Cooling ventilation control near heat exchangers, cooling modules, and air/vacuum components.
4、 Technical characteristics (typical)
Multi channel fan control output, supporting parallel or partitioned control of multiple fans
Supports PWM (Pulse Width Modulation) or voltage controlled wind speed
Real time speed feedback monitoring function (with Tach signal input)
Power protection function: overcurrent, overvoltage, short circuit protection
Onboard status indicator lights (such as fan running, fault, power supply status)
Industrial grade PCB design with high reliability and heat resistance
2.产 品 展 示
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