Tokyo Electron 2187-100744-11配电系统 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、基本信息
产品型号：2187-100744-11
产品名称：配电系统（Power Distribution System）
制造商：Tokyo Electron Ltd.（东京电子）
产品类别：电源/配电子系统组件
典型应用设备：用于 TEL 的半导体制造设备，如蚀刻、CVD、清洗或真空处理设备
二、功能定位
电源集中分配模块
将主输入电源（AC 或 DC）转换为多路稳定输出，供设备内部各模块使用。
电源保护与隔离
对不同负载电路进行隔离和短路/过载保护，确保控制板、驱动器、传感器等模块供电稳定、安全。
状态监控与故障隔离
可集成电源状态指示、告警、熔断器或断路保护机制，支持故障定位与断路响应。
电源接口整合平台
整合多种电压等级（如 ±24V、5V、12V 等）至单一模块，简化整机供电架构。
三、典型应用领域
半导体设备控制系统供电
为控制主板、I/O 接口板、通信模块、真空泵驱动器等提供多路电源支持。
高可靠性配电要求场合
特别适用于洁净室环境下对电源稳定性和抗干扰能力要求极高的设备系统。
模块化系统配电架构
作为设备机架中的标准模块，与 TEL 各类电源接口、线束连接系统兼容。
英文资料：
1、 Basic Information
Product model: 2187-100744-11
Product Name: Power Distribution System
Manufacturer: Tokyo Electron Ltd
Product Category: Power Supply/Electronic System Components
Typical application equipment: Semiconductor manufacturing equipment used for TEL, such as etching CVD、 Cleaning or vacuum treatment equipment
2、 Functional positioning
Centralized power distribution module
Convert the main input power (AC or DC) into multiple stable outputs for use by various modules inside the device.
Power protection and isolation
Isolate and short-circuit/overload protect different load circuits to ensure stable and safe power supply for control boards, drivers, sensors, and other modules.
Status monitoring and fault isolation
It can integrate power status indication, alarm, fuse or circuit breaker protection mechanism, support fault location and circuit breaker response.
Power interface integration platform
Integrate multiple voltage levels (such as ± 24V, 5V, 12V, etc.) into a single module to simplify the power supply architecture of the whole machine.
3、 Typical application areas
Power supply for semiconductor equipment control system
Provide multi-channel power support for control motherboards, I/O interface boards, communication modules, vacuum pump drivers, etc.
High reliability distribution requirements
Especially suitable for equipment systems that require extremely high power stability and anti-interference ability in clean room environments.
Modular system distribution architecture
As a standard module in the equipment rack, it is compatible with various TEL power interfaces and wiring harness connection systems.
2.产 品 展 示
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