Novellus Systems 03-417236-00接口板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Novellus Systems 03-417236-00 接口板（Interface Board） 是一款用于 Novellus 半导体工艺设备中的专用通信与控制桥接模块。它主要承担系统内部的信号转换、中继与模块互联功能，是设备实现多模块协同控制的关键部件。
一、基本信息
产品名称：接口板（Interface Board）
产品型号：03-417236-00
制造商：Novellus Systems Inc.（已并入 Lam Research）
组件类型：控制通信桥接模块 / 多通道 I/O 接口板
典型用途：模块间信号传输、电气连接、数据通道中继
二、核心功能
| 功能类型 | 描述 |
|---|---|
| 信号分配与转换 | 将主控系统发出的控制信号转接、调理并传输到各子系统（如阀门控制板、传感器模块等） |
| 多通道 I/O 支持 | 支持多路模拟/数字输入输出，用于控制多个外部设备或传感器 |
| 总线中继桥接 | 可能连接多个通信协议（如 RS232、RS485、CAN、I²C、SPI 等）之间的通道 |
| 系统集成桥梁 | 在 CPU 控制模块与下游执行模块之间作为“中心节点” |
| 电气隔离保护 | 含信号隔离与浪涌保护，提高系统整体稳定性和抗干扰能力 |
三、应用设备场景（推测）
此接口板可能被广泛应用于 Novellus 下列设备系列中：
Concept 系列（PECVD / SACVD / HDP）
ALTUS 系列（ALD）
Speed 系列（金属沉积）
INOVA 或 VECTOR 平台
在这些系统中，该板卡可能连接以下设备子系统：
工艺气体控制模块（MFC 控制）
真空泵控制器与压力传感器
腔室加热器/冷却系统
电动阀控制单元
主控制器/PLC 通信路径
英文资料：
The Novellus Systems 03-417236-00 Interface Board is a specialized communication and control bridging module used in Novellus semiconductor process equipment. It mainly undertakes the signal conversion, relay, and module interconnection functions within the system, and is a key component for achieving multi module collaborative control of the equipment.
1、 Basic Information
Product Name: Interface Board
Product model: 03-417236-00
Manufacturer: Novellus Systems Inc. (merged into Lam Research)
Component type: Control communication bridge module/Multi channel I/O interface board
Typical applications: signal transmission between modules, electrical connections, data channel relay
2、 Core functions
Function type description
Signal allocation and conversion are used to transfer, condition, and transmit control signals from the main control system to various subsystems (such as valve control boards, sensor modules, etc.)
Multi channel I/O support supports multiple analog/digital inputs and outputs, used to control multiple external devices or sensors
Bus relay bridging may connect channels between multiple communication protocols (such as RS232, RS485, CAN, I ² C, SPI, etc.)
The system integration bridge serves as the "central node" between the CPU control module and downstream execution modules
Electrical isolation protection includes signal isolation and surge protection, which improves the overall stability and anti-interference ability of the system
3、 Application device scenario (speculated)
This interface board may be widely used in the following device series of Novellus:
Concept series (PECVD/SACVD/HDP)
ALTUS series (ALD)
Speed series (metal deposition)
INOVA or VECTOR platform
In these systems, the board may be connected to the following device subsystems:
Process Gas Control Module (MFC Control)
Vacuum pump controller and pressure sensor
Chamber heater/cooling system
Electric valve control unit
Main controller/PLC communication path
2.产 品 展 示
3.其他产品
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