KLA Tencor 0348368-002组合接口板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 0348368-002 组合接口板（Combo Interface Board）是一种专用于半导体制造设备中的信号整合和连接功能的电路板。根据该公司产品架构和类似接口模块的用途，其主要产品应用领域如下：
一、产品功能概述
0348368-002 接口板具备多种电气接口标准，用于在设备内部不同功能模块之间建立数据通信、控制信号、模拟/数字输入输出等通道。常用于连接以下组件：
激光/光学检测系统
电子束扫描模组
信号处理单元
扫描平台控制器
探头控制模块
二、典型应用领域
晶圆缺陷检测系统
如 KLA 的 Surfscan 系列、eSxx 系列、236x 系列中，接口板用于连接扫描平台与缺陷识别处理系统，实现同步控制与图像数据传输。
CD-SEM 形貌量测系统
用于实现电子束扫描探头控制器与主机数据处理系统之间的高速通信，协助实现线宽、边缘粗糙度等精密测量功能。
自动化微影检测设备
在光刻后检测系统中，接口板作为光源控制、反射采集、移动平台定位系统的控制和反馈桥梁。
晶圆传输与装载单元
在晶圆装载、校准和对位过程中，接口板控制各传感器、执行器，实现自动搬运及状态检测。
多功能检测/分析平台
适配多传感输入、多路信号输出的系统架构，支持高精度、多通道并行处理要求。
英文资料：
The KLA Tencor 0348368-002 Combo Interface Board is a circuit board specifically designed for signal integration and connection functions in semiconductor manufacturing equipment. According to the company's product architecture and the purpose of similar interface modules, its main product application areas are as follows:
1、 Product Function Overview
The 0348368-002 interface board has multiple electrical interface standards, which are used to establish data communication, control signals, analog/digital input and output channels between different functional modules inside the device. Commonly used to connect the following components:
Laser/Optical Detection System
Electron beam scanning module
Signal Processing Unit
Scan platform controller
Probe control module
2、 Typical application areas
Wafer defect detection system
In KLA's Surfscan series, eSxx series, and 236x series, the interface board is used to connect the scanning platform with the defect recognition processing system, achieving synchronous control and image data transmission.
CD-SEM morphology measurement system
Used to achieve high-speed communication between the electronic beam scanning probe controller and the host data processing system, assisting in precise measurement functions such as line width and edge roughness.
Automated Shadow Detection Equipment
In the post lithography detection system, the interface board serves as a control and feedback bridge for light source control, reflection acquisition, and mobile platform positioning system.
Wafer transfer and loading unit
During the process of wafer loading, calibration, and alignment, the interface board controls various sensors and actuators to achieve automatic handling and status detection.
Multi functional detection/analysis platform
A system architecture that adapts to multiple sensor inputs and multiple signal outputs, supporting high-precision and multi-channel parallel processing requirements.
2.产 品 展 示
3.其他产品
KOLLMORGEN CB06561 PRD-B040SSLZ-62 伺服驱动器
4.其他英文产品
YT204001-KA/5 voltage signal regulator
ASEA DSPC150 Robot Control Board
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| 55NM81-120-2 | S20260-VTS | IMMCF03 |
| 55NM81-100-2 | SS2000D3I | IMFBS01 |
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