KLA Tencor 710-650099-20数字处理器模块 PDF资料
1.产 品 资 料 介 绍:
中文资料:
KLA Tencor 710-650099-20 数字处理器模块
该模块是用于 KLA Tencor 2132 系列晶圆表面缺陷检测设备中的核心数字处理单元。它主要负责对来自传感器和控制系统的原始数据进行数字化处理和转换,提供高效的数据计算和信号分析功能,从而保障检测系统的准确性和稳定性。
主要功能:
数字化处理和转换传感器采集的信号
实时数据分析和运算,支持缺陷检测算法执行
协调和同步设备内部各子系统的工作状态
向上位控制系统反馈处理结果和状态信息
应用领域:
半导体晶圆表面缺陷检测
高精度光学和电子束检测系统
半导体制造过程的质量监控
设备控制与工艺参数调整的核心模块
产品信息:
型号:710-650099-20
类型:数字处理器模块
适用设备:KLA Tencor 2132 系列及类似晶圆检测平台
工作环境:集成于设备主控柜内部,执行数字信号处理任务
英文资料:
KLA Tencor 710-650099-20 Digital Processor Module
This module is the core digital processing unit used in the KLA Tencor 2132 series wafer surface defect detection equipment. It is mainly responsible for digitizing and converting raw data from sensors and control systems, providing efficient data calculation and signal analysis functions, thereby ensuring the accuracy and stability of the detection system.
Main functions:
Digitally process and convert signals collected by sensors
Real time data analysis and computation, supporting the execution of defect detection algorithms
Coordinate and synchronize the working status of various subsystems within the device
Feedback processing results and status information to the upper control system
Application areas:
Surface defect detection of semiconductor wafers
High precision optical and electron beam detection system
Quality Monitoring of Semiconductor Manufacturing Process
The core module of equipment control and process parameter adjustment
Product information:
Model: 710-650099-20
Type: Digital Processor Module
Applicable equipment: KLA Tencor 2132 series and similar wafer inspection platforms
Work environment: Integrated inside the main control cabinet of the equipment, performing digital signal processing tasks
2.产 品 展 示
3.其他产品
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