KLA Tencor 0390749-000安全监控板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 0390749-000 安全监控板（Safety Monitor Board）是KLA Tencor晶圆检测设备中关键的安全保障模块，主要用于对设备内氮气（N₂）供应系统进行实时监测和保护，防止因氮气供应异常导致的设备故障或安全事故。
详细功能描述
氮气系统状态监控
该安全监控板能够连续检测氮气供应系统中的压力、流量等关键参数。
通过传感器反馈数据，实时判断气体供应是否处于正常范围内。
确保整个检测设备中用于防尘、防爆及环境控制的氮气供应安全稳定。
异常检测与报警机制
当系统检测到气压不足、流量异常或气体泄漏时，板载控制逻辑会立即触发报警信号。
报警信息会被发送至主控制系统，并通过设备的用户界面提醒操作人员。
通过及时报警，减少设备潜在的运行风险，避免检测流程中断。
自动安全保护功能
在氮气供应严重异常或危险情况发生时，安全监控板能够自动关闭氮气供应阀门。
防止因气体供应问题引起的设备损坏或安全隐患。
保障操作人员和设备的安全。
系统集成和通信
安全监控板设计为与KLA Tencor主控制系统紧密集成。
支持数字或模拟信号通信，确保安全状态信息的实时传递。
可实现远程监控和故障诊断，方便设备维护和管理。
工业级设计标准
板卡采用工业级电子元器件，耐高温、抗电磁干扰，适应半导体制造的严苛环境。
结构紧凑，便于安装于设备内部指定位置。
支持长期稳定运行，减少维护频率。
应用场景
半导体晶圆检测设备
主要用于KLA Tencor各型号晶圆检测系统的氮气保护系统中，确保无尘环境和防爆要求。洁净室自动化设备
在需要氮气保护的生产设备中实现安全气体管理。工业安全监控系统
用于监测气体供应安全的其他相关工业自动化设备。
英文资料：
The KLA Tencor 0390749-000 Safety Monitor Board is a critical safety assurance module in the KLA Tencor wafer inspection equipment, mainly used for real-time monitoring and protection of the nitrogen (N ₂) supply system inside the equipment, to prevent equipment failure or safety accidents caused by abnormal nitrogen supply.
Detailed functional description
Nitrogen system status monitoring
This safety monitoring board can continuously detect key parameters such as pressure and flow rate in the nitrogen supply system.
Real time judgment of whether gas supply is within normal range through sensor feedback data.
Ensure the safe and stable supply of nitrogen gas for dust prevention, explosion prevention, and environmental control throughout the entire testing equipment.
Abnormal detection and alarm mechanism
When the system detects insufficient air pressure, abnormal flow rate, or gas leakage, the onboard control logic will immediately trigger an alarm signal.
The alarm information will be sent to the main control system and alerted to the operator through the device's user interface.
By promptly alerting, potential operational risks of the equipment can be reduced and interruptions in the detection process can be avoided.
Automatic security protection function
When there is a serious abnormality or dangerous situation in the nitrogen supply, the safety monitoring board can automatically close the nitrogen supply valve.
Prevent equipment damage or safety hazards caused by gas supply issues.
Ensure the safety of operators and equipment.
System integration and communication
The safety monitoring board is designed to be tightly integrated with the KLA Tencor main control system.
Support digital or analog signal communication to ensure real-time transmission of safety status information.
It can achieve remote monitoring and fault diagnosis, facilitating equipment maintenance and management.
Industrial grade design standards
The board adopts industrial grade electronic components, which are resistant to high temperatures and electromagnetic interference, and can adapt to the harsh environment of semiconductor manufacturing.
Compact structure, easy to install in designated locations inside the equipment.
Support long-term stable operation and reduce maintenance frequency.
Application scenarios
Semiconductor wafer testing equipment
Mainly used in the nitrogen protection system of KLA Tencor's various wafer inspection systems to ensure a dust-free environment and explosion-proof requirements.
Cleanroom automation equipment
Implement safe gas management in production equipment that requires nitrogen protection.
Industrial Safety Monitoring System
Other related industrial automation equipment used for monitoring gas supply safety.
2.产 品 展 示
3.其他产品
4.其他英文产品
ASEA 57360001-HG Circuit Board
AMAT 0190-66253 Communication Module
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