KLA Tencor 720-21901-003扫描器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 720-21901-003 扫描器模块 是一款用于半导体检测与计量系统中的精密部件，主要功能是参与高分辨率图像扫描、数据采集与定位控制，它通常集成在晶圆缺陷检测设备或薄膜测量仪器中。
产品应用领域：
晶圆表面检测设备
在如 Surfscan 或 SP 系列等系统中，用于扫描晶圆表面，捕捉并传送光学图像或缺陷数据，实现高灵敏度的缺陷检测与标记。图像分析与光学检测系统
模块驱动扫描机构对目标区域进行线性或二维扫描，为系统提供高精度图像或反射数据采样，是实现图像分辨与精度控制的核心部件之一。激光干涉计测系统
用于支持纳米级别的精确位移测量，通过扫描反馈实现对探测头或平台的精细定位控制。自动化测量设备
协助系统对晶圆边缘、掩模对准、图案对比等关键工艺参数进行快速扫描与数据回传。高速数据采集与处理平台
配合图像传感器或探测器进行高频率的数据采集，确保检测系统具有实时反馈与处理能力。系统通信与反馈控制
与主控板通信，传输扫描位置、状态反馈和错误信息，支持闭环控制系统运作。
该模块通常在KLA Tencor高端检测设备中发挥关键作用，适用于工艺控制、缺陷分析、制程监测等核心应用场景。
英文资料：
The KLA Tencor 720-21901-003 scanner module is a precision component used in semiconductor detection and metrology systems. Its main function is to participate in high-resolution image scanning, data acquisition, and positioning control. It is usually integrated into wafer defect detection equipment or thin film measurement instruments.
Product application areas:
Wafer surface inspection equipment
In systems such as Surfscan or SP series, it is used to scan wafer surfaces, capture and transmit optical images or defect data, and achieve high-sensitivity defect detection and labeling.
Image Analysis and Optical Detection System
The module driven scanning mechanism performs linear or two-dimensional scanning on the target area, providing high-precision image or reflection data sampling for the system. It is one of the core components for achieving image resolution and accuracy control.
Laser interferometer measurement system
Used to support precise displacement measurement at the nanoscale, achieving precise positioning control of the detection head or platform through scanning feedback.
Automated measuring equipment
Assist the system in quickly scanning and transmitting data on key process parameters such as wafer edges, mask alignment, and pattern contrast.
High speed data acquisition and processing platform
Cooperate with image sensors or detectors for high-frequency data acquisition to ensure that the detection system has real-time feedback and processing capabilities.
System Communication and Feedback Control
Communicate with the main control board, transmit scanning position, status feedback, and error information, and support closed-loop control system operation.
This module typically plays a critical role in KLA Tencor's high-end inspection equipment and is suitable for core application scenarios such as process control, defect analysis, and process monitoring.
2.产 品 展 示
3.其他产品
KOLLMORGEN CP310250 PRD-P310250Z-55 伺服驱动器
4.其他英文产品
Asea 2668-184-280 12 slot control board
HAAS 93-32-3550J Intelligent Driver
ABB CHBX01R 2VAA008575R1 redundant modul
| R8AGENA-R2-NS-NV-00 | R21HENA-R1-NS-VS-01 | R32-GEN-R2-NS-NY-00 |
| R8AFENA-R4-NS-NV-02 | R33HMNP-R2-NS-VS-00 | R33GEB0-R2-NS-VS-02 |
| R88SENA-R2-NS-NV-03 | SC103010Y4 | S31SSNA-RNNS-02 |
| R88HENA-R2-NS-NV-00 | R33GENC-HS-NS-NV-00 | R43HENA-R2-NS-VS-02 |
| R88GSNF-TS-M2-NV-04 | R22GENA-R1-NS-NV-02 | S21GSNA-RNNM-04 |
| R88GENA-R2-NS-NV-00-3 | R35KENC-R2-NS-NV-00 | S32ANAH-RNNM-00 |
| R88GENA-R2-NS-NV-00 | SC105-001-T4 | S33HNAA-RNVM-00 |
| R86HENA-R2-NS-NV-00 | R43GCNA-R2-NS-VS-00 | S33GNNA-RNVM-00 |
| R86GENA-R2-NS-NV-00 | R32SSNA-R2-NS-NV-05 | S32HNNA-HSNS-02 |
| R86GEBA-R2-NS-VS-00 | R24HENA-HS-NS-NV-00 | R36SSNA-R2-NS-NV-07 |
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