KLA Tencor 710-404778-00限制板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 710-404778-00 限制板 — 产品引用领域
1. 半导体设备应用
应用于晶圆检测设备、光学量测设备、缺陷检测系统等。
典型系统包括：Surfscan、SP 系列、2132、6220 等型号。
功能：控制和检测快门或运动部件的终端位置，确保机械动作精准可靠。
2. 机械限位控制
用于限制移动部件（如快门、探测头、滤光片载台）的行程。
在高速或自动化环境中作为安全限位保护装置，避免部件越位损坏。
3. 精密运动控制系统
与电动平台、伺服电机、线性滑台等协同工作，实现位置反馈。
提供动作完成确认信号，作为设备自动运行中的闭环控制部分。
4. 晶圆生产线自动化
用于晶圆处理、搬运、扫描等过程中相关部件的启停控制。
在高度自动化流程中，提升运行稳定性和故障可诊断性。
5. 设备维护与故障检测
支持工程师诊断快门、电机、传动机构的工作状态。
限位信号异常可作为判断设备运行异常或故障的重要依据。
应用特点总结：
精确限位控制
设备安全保护
快速动作反馈
半导体高精度需求专用
英文资料：
KLA Tencor 710-404778-00 Restricted Board - Product Reference Field
1. Application of semiconductor equipment
Applied to wafer inspection equipment, optical measurement equipment, defect detection systems, etc.
Typical systems include models such as Surfscan, SP series, 2132, 6220, etc.
Function: Control and detect the terminal position of the shutter or moving parts to ensure precise and reliable mechanical action.
2. Mechanical limit control
Used to limit the travel of moving parts such as shutters, probes, and filter stages.
As a safety limit protection device in high-speed or automated environments, it prevents component damage from exceeding its limit.
3. Precision motion control system
Collaborate with electric platforms, servo motors, linear sliding tables, etc. to achieve position feedback.
Provide action completion confirmation signals as the closed-loop control part in the automatic operation of the device.
4. Automation of wafer production line
Used for start stop control of related components during wafer processing, handling, scanning, and other processes.
Improve operational stability and fault diagnosability in highly automated processes.
5. Equipment maintenance and fault detection
Support engineers to diagnose the working status of shutters, motors, and transmission mechanisms.
Abnormal limit signals can serve as an important basis for determining abnormal or faulty equipment operation.
Summary of application characteristics:
Precise limit control
Equipment safety protection
Quick action feedback
Specialized for high-precision semiconductor requirements
2.产 品 展 示
3.其他产品
4.其他英文产品
Gespac GESOUT-3 OUT-3B Controller Module
GE IS210AEBIH1BED interface card module
Kollmorgen MMC-SD-0.5-230-D servo drive
| RMQ-121D | CACR-SR44BF1AFB | EXM-7 |
| RMQ-111D | CACR-UIR010101FD | 63-0024-02 |
| RMP420 | CACR-IR-101010F | 802-5940-02 |
| RMP420 | CACR-SR09TZ6SM | EXP-VID-B |
| RMP201-8 | CACR-IR050505F | 11901 |
| RMP201-8 | CACR-HR20UB-Y9 | 61-0154-22 |
| RMP200-8 | CACR-PR30BC3AFY134 | 61-0475-14 |
| RMP200-8 | CACR-SR15SB1AFY100 | EPC-27 |
| RMP-121D | CACR-PR30BC3CSY166C | 61-0539-10 |
| RMP-112D | CACR-IR020202FB | 067-02389-0001 |
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