AMAT 1070-01020气体监测仪 PDF资料
1.产 品 资 料 介 绍:
中文资料:
AMAT 1070-01020 是应用材料公司(Applied Materials)生产的一款气体监测仪,主要用于半导体制造过程中对气体流量和浓度的实时监测。该设备确保关键工艺气体的准确供应,保障生产过程的稳定性和产品质量。
主要功能:
气体流量监测:实时检测气体流量,确保供应符合工艺要求。
气体浓度分析:分析气体中的成分比例,确保工艺气体的纯度和准确性。
数据记录与报警:记录监测数据,并在检测到异常时发出报警,便于及时采取措施。
应用领域:
半导体制造:在晶圆加工过程中,精确控制气体供应对于刻蚀、沉积等工艺至关重要。
显示面板生产:在液晶显示器(LCD)和有机发光二极管(OLED)面板的制造中,气体监测确保显示效果和质量。
太阳能电池生产:在光伏产业中,气体监测有助于优化电池效率和性能。
通过使用 AMAT 1070-01020 气体监测仪,制造商能够提高生产过程的可控性和一致性,确保产品质量并减少生产风险。
英文资料:
AMAT 1070-01020 is a gas monitoring instrument produced by Applied Materials, mainly used for real-time monitoring of gas flow rate and concentration in semiconductor manufacturing processes. This equipment ensures the accurate supply of key process gases, guaranteeing the stability of the production process and product quality.
Main functions:
Gas flow monitoring: Real time detection of gas flow to ensure supply meets process requirements.
Gas concentration analysis: Analyze the proportion of components in the gas to ensure the purity and accuracy of the process gas.
Data recording and alarm: Record monitoring data and issue alarms when anomalies are detected, facilitating timely action.
Application areas:
Semiconductor manufacturing: Accurate control of gas supply is crucial for processes such as etching and deposition during wafer processing.
Display panel production: In the manufacturing of liquid crystal displays (LCD) and organic light-emitting diode (OLED) panels, gas monitoring ensures display performance and quality.
Solar cell production: In the photovoltaic industry, gas monitoring helps optimize cell efficiency and performance.
By using the AMAT 1070-01020 gas monitor, manufacturers can improve the controllability and consistency of the production process, ensure product quality, and reduce production risks.
2.产 品 展 示
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