MKS AX8403A气体发生器 PDF资料
1.产 品 资 料 介 绍：
中文资料：
MKS Instruments 的 AX8403A 是一款臭氧发生器，主要用于需要高浓度、超洁净臭氧的工业和实验室应用。
主要特点：
高浓度臭氧输出：通过无声放电技术，将纯氧转化为高浓度臭氧，适用于需要高纯度臭氧的工艺过程。
超洁净设计：所需的掺杂氮气量极少，显著降低了如 NOx 化合物等污染物的产生，确保臭氧的高纯度。
灵活的流量范围：支持 5 至 20 slm 的氧气流量，满足不同工艺需求。
应用领域：
半导体制造：用于晶圆清洗、表面处理和薄膜沉积等工艺。
光伏产业：在太阳能电池生产中，用于表面清洁和钝化处理。
显示面板制造：用于 LCD 和 OLED 面板的清洁和制程优化。
医疗器械消毒：利用臭氧的强氧化性，对医疗器械进行高效消毒。
技术规格：
臭氧输出：高达 160 克/小时。
氧气流量范围：5 至 20 slm。
电源要求：208V，三相，50/60 Hz，20A。
冷却要求：需要水冷，水温范围 5 至 25°C，最低水流量 7.6 lpm。
尺寸和重量：483 x 445 x 267 mm，重量约 59 kg。
英文资料：
The AX8403A from MKS Instruments is an ozone generator primarily used for industrial and laboratory applications that require high concentrations of ultra clean ozone.
Main features:
High concentration ozone output: Through silent discharge technology, pure oxygen is converted into high concentration ozone, suitable for processes that require high-purity ozone.
Ultra clean design: The required amount of nitrogen doping is minimal, significantly reducing the production of pollutants such as NOx compounds and ensuring high purity of ozone.
Flexible flow range: Supports oxygen flow rates of 5 to 20 slm to meet different process requirements.
Application areas:
Semiconductor manufacturing: used for processes such as wafer cleaning, surface treatment, and thin film deposition.
Photovoltaic industry: used for surface cleaning and passivation treatment in solar cell production.
Display panel manufacturing: used for cleaning and process optimization of LCD and OLED panels.
Medical Device Disinfection: Utilizing the strong oxidizing properties of ozone to efficiently disinfect medical devices.
Technical specifications:
Ozone output: up to 160 grams per hour.
Oxygen flow range: 5 to 20 slm.
Power requirements: 208V, three-phase, 50/60 Hz, 20A.
Cooling requirements: Water cooling is required, with a water temperature range of 5 to 25 ° C and a minimum water flow rate of 7.6 lpm.
Size and weight: 483 x 445 x 267 mm, weighing approximately 59 kg.
2.产 品 展 示
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