AMAT 0190-45353 伺服驱动器 PDF资料
1.产 品 资 料 介 绍:
中文资料:
AMAT 0190-45353 伺服驱动器是应用材料公司(Applied Materials)生产的一款用于精确运动控制的驱动设备。该驱动器在多个领域的高精度设备中有着重要的应用,尤其是在半导体制造和先进制造技术中。以下是它的主要产品应用领域:
1. 半导体制造
- 晶圆处理: AMAT 0190-45353 伺服驱动器广泛应用于晶圆处理设备中,包括薄膜沉积、刻蚀、清洗等工艺设备。通过精确控制电机的运动,确保晶圆在各个处理步骤中保持正确的位置和速度。
- 光刻设备: 在光刻设备中,伺服驱动器负责精确定位和移动光刻台,确保图案转移过程的高精度,从而提高芯片的质量和生产效率。
- 晶圆搬运: 用于晶圆搬运机器人中,确保晶圆在不同工艺单元之间的精准运输和放置,避免任何损坏或污染。
2. 平板显示器生产
- 薄膜沉积: 在平板显示器的制造过程中,伺服驱动器用于控制薄膜沉积设备的精确运动。这些控制确保薄膜均匀覆盖在基板上,并精确调节沉积速率。
- 切割与划片: 在显示器生产的切割或划片过程中,驱动器精确控制刀具或激光的移动,确保切割的精度和一致性。
3. 精密仪器与高端制造
- 激光切割与焊接: 在精密激光切割和焊接设备中,伺服驱动器能够高效控制激光头和工作台的精确运动,确保加工部件的高精度和高质量。
- 自动化装配系统: 在自动化生产线中,伺服驱动器控制机器手臂等设备,确保精密部件的装配过程高效且无误差。
4. 医疗设备制造
- 微型机械操作: 在医疗设备中,伺服驱动器用于控制微型机械手臂或精密仪器,确保微米级的精度,这对于许多医疗设备,如机器人手术系统、药物输送系统等,至关重要。
英文资料:
AMAT 0190-45353 servo drive is a driving device produced by Applied Materials for precise motion control. This driver has important applications in high-precision equipment in multiple fields, especially in semiconductor manufacturing and advanced manufacturing technology. The following are its main product application areas:
1. Semiconductor manufacturing
Wafer processing: AMAT 0190-45353 servo driver is widely used in wafer processing equipment, including thin film deposition, etching, cleaning and other process equipment. By precisely controlling the movement of the motor, ensure that the wafer maintains the correct position and speed in each processing step.
Lithography equipment: In lithography equipment, servo drivers are responsible for precise positioning and movement of the lithography stage, ensuring high precision in the pattern transfer process, thereby improving the quality and production efficiency of chips.
Wafer Handling: Used in wafer handling robots to ensure precise transportation and placement of wafers between different process units, avoiding any damage or contamination.
2. Production of flat panel displays
Thin film deposition: In the manufacturing process of flat panel displays, servo drivers are used to control the precise movement of thin film deposition equipment. These controls ensure uniform coverage of the film on the substrate and precise adjustment of the deposition rate.
Cutting and cutting: In the cutting or cutting process of display production, the driver precisely controls the movement of the cutting tool or laser to ensure the accuracy and consistency of the cutting.
3. Precision instruments and high-end manufacturing
Laser cutting and welding: In precision laser cutting and welding equipment, servo drives can efficiently control the precise movement of the laser head and worktable, ensuring high precision and quality of the processed parts.
Automated assembly system: In automated production lines, servo drives control equipment such as robotic arms to ensure efficient and error free assembly of precision components.
4. Manufacturing of medical equipment
Micro mechanical operation: In medical equipment, servo drives are used to control micro robotic arms or precision instruments, ensuring micrometer level accuracy, which is crucial for many medical devices such as robotic surgical systems, drug delivery systems, etc.
2.产 品 展 示
3.其他产品
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