COMDEL CLX-2500 FP1336R2射频发生器 PDF资料
1.产 品 资 料 介 绍:
中文资料:
COMDEL CLX-2500 FP1336R2 是一款高性能射频(RF)发生器,主要用于工业、科研和实验室中需要精准和稳定射频信号的应用。该射频发生器以其出色的输出功率、频率稳定性和可靠性,广泛应用于半导体制造、材料处理、医疗设备、实验室研究等领域。
主要特点:
高输出功率:
- CLX-2500 提供高达 2500 W 的输出功率,适用于各种射频加热、等离子体生成和材料处理等高功率需求的应用。
宽频率范围:
- 具有 13.56 MHz 的标准频率,适用于许多半导体加工、等离子体应用和其他频率敏感的工作环境。
高效的频率稳定性:
- 提供稳定的射频信号输出,确保系统性能在长期操作中维持稳定,减少对设备的影响,提高生产效率。
精确的功率调节:
- 内置精确的功率调节功能,可根据不同需求调整射频功率输出,从而优化工作效率,确保系统的最佳表现。
先进的保护机制:
- 内置多重保护功能,包括过载保护、过温保护等,确保设备在恶劣环境下也能稳定运行,延长设备寿命。
可调的输出阻抗:
- 支持可调输出阻抗,使其适应不同的负载条件,提供更高的匹配精度和更低的信号反射。
兼容性:
- CLX-2500 可与各种射频应用系统兼容,支持多种输入和输出接口,并能够与其他测试设备如示波器、频谱分析仪等集成。
应用领域:
半导体制造:
- 在等离子体刻蚀、薄膜沉积等半导体工艺中,CLX-2500 提供稳定且高效的射频能量,确保精准的工艺控制。
材料处理:
- 用于金属表面处理、涂层、等离子体焊接等材料处理工艺,能够提供强大的射频能量以影响物质的性质。
等离子体生成:
- 广泛应用于等离子体工艺中,如等离子体清洗、等离子体增强化学气相沉积等领域。
医疗应用:
- 在某些医疗设备中,射频发生器被用来加热或激发物质,或用于精密的诊断设备中。
实验室研究:
- 在物理、化学等科学实验中,CLX-2500 可用于控制高能量的射频信号,支持多种实验和研究。
电磁兼容性测试:
- 可用于电磁兼容性(EMC)测试、射频干扰(RFI)测试等,帮助验证设备在不同频率下的性能。
英文资料:
COMDEL CLX-2500 FP1336R2 is a high-performance radio frequency (RF) generator primarily used in industrial, scientific research, and laboratory applications that require precise and stable RF signals. This RF generator is widely used in semiconductor manufacturing, material processing, medical equipment, laboratory research, and other fields due to its excellent output power, frequency stability, and reliability.
Main features:
High output power:
The CLX-2500 provides an output power of up to 2500 W, suitable for various high-power applications such as RF heating, plasma generation, and material processing.
Wide frequency range:
With a standard frequency of 13.56 MHz, it is suitable for many semiconductor processing, plasma applications, and other frequency sensitive working environments.
Efficient frequency stability:
Provide stable RF signal output to ensure stable system performance during long-term operation, reduce impact on equipment, and improve production efficiency.
Accurate power regulation:
Built in precise power adjustment function, which can adjust the RF power output according to different needs, thereby optimizing work efficiency and ensuring the best performance of the system.
Advanced protection mechanisms:
Built in multiple protection functions, including overload protection, over temperature protection, etc., ensure that the equipment can operate stably even in harsh environments and extend its lifespan.
Adjustable output impedance:
Support adjustable output impedance to adapt to different load conditions, providing higher matching accuracy and lower signal reflection.
compatibility:
The CLX-2500 is compatible with various RF application systems, supports multiple input and output interfaces, and can be integrated with other testing equipment such as oscilloscopes, spectrum analyzers, etc.
Application areas:
Semiconductor manufacturing:
In semiconductor processes such as plasma etching and thin film deposition, CLX-2500 provides stable and efficient RF energy, ensuring precise process control.
Material handling:
Used for material treatment processes such as metal surface treatment, coating, plasma welding, etc., it can provide powerful radio frequency energy to affect the properties of materials.
Plasma generation:
Widely used in plasma processes, such as plasma cleaning, plasma enhanced chemical vapor deposition, and other fields.
Medical applications:
In some medical devices, radiofrequency generators are used to heat or excite substances, or in precision diagnostic equipment.
Laboratory research:
In scientific experiments such as physics and chemistry, CLX-2500 can be used to control high-energy RF signals, supporting various experiments and research.
Electromagnetic compatibility testing:
Can be used for electromagnetic compatibility (EMC) testing, radio frequency interference (RFI) testing, etc., to help verify the performance of equipment at different frequencies.
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