AE MDX-L12直流发电机 PDF资料
1.产 品 资 料 介 绍:
中文资料:
Advanced Energy(AE)公司的 MDX-L12 系列直流电源是一种高性能的磁控管驱动电源,广泛应用于溅射镀膜等真空镀膜工艺中。
主要特点:
高功率输出:MDX-L12 系列提供高达 12 kW 的功率输出,满足大面积镀膜和高生产率需求。
精确控制:具备精确的电流、电压和功率调节功能,确保镀膜过程的稳定性和一致性。
优异的灭弧性能:采用先进的灭弧技术,减少弧光放电对镀膜质量的影响,提高产品良率。
低输出纹波:输出纹波低,确保镀膜层的均匀性和质量。
紧凑设计:结构紧凑,便于集成到现有的真空镀膜系统中。
应用领域:
磁控管溅射:作为磁控管溅射的电源,广泛应用于半导体、光学和装饰性镀膜等领域。
偏压电源:在射频溅射和刻蚀系统中,作为偏压电源使用,提供精确的偏压控制。
实验室研究:由于其精确的控制性能和高可靠性,适用于各种研究和开发应用。
MDX-L12 系列直流电源以其高可靠性和优异性能,成为真空镀膜行业的领先产品,满足各种复杂工艺的需求。
英文资料:
The MDX-L12 series DC power supply from Advanced Energy (AE) is a high-performance magnetron drive power supply widely used in vacuum coating processes such as sputtering coating.
Main features:
High power output: The MDX-L12 series provides up to 12 kW of power output, meeting the needs of large-area coating and high productivity.
Precise control: With precise current, voltage, and power regulation functions, it ensures the stability and consistency of the coating process.
Excellent arc extinguishing performance: Advanced arc extinguishing technology is adopted to reduce the impact of arc discharge on coating quality and improve product yield.
Low output ripple: Low output ripple ensures the uniformity and quality of the coating layer.
Compact design: The structure is compact and easy to integrate into existing vacuum coating systems.
Application areas:
Magnetron sputtering: As a power source for magnetron sputtering, it is widely used in fields such as semiconductors, optics, and decorative coatings.
Bias power supply: Used as a bias power supply in RF sputtering and etching systems, providing precise bias control.
Laboratory research: Due to its precise control performance and high reliability, it is suitable for various research and development applications.
The MDX-L12 series DC power supply has become a leading product in the vacuum coating industry due to its high reliability and excellent performance, meeting the needs of various complex processes.
2.产 品 展 示
3.其他产品
ABB TVB-1202-1ANET 1381-647980-12 电路板模块
4.其他英文产品
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ASEA DSQC108 controller backplane
RADISYS 061-05927-0031 adapter module
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