AE APEX5513 射频发生器 PDF资料
1.产 品 资 料 介 绍：
中文资料：
AE APEX5513 是由 Advanced Energy（AE）公司生产的一款高性能射频（RF）发生器，广泛应用于半导体制造、薄膜沉积、等离子体处理等领域。
主要特点：
高功率密度：提供高达 1.5 kW 的输出功率，满足高功率应用需求。
紧凑设计：紧凑的机身设计，节省空间，方便集成到现有系统中。
精确控制：具备精确的功率调节和反馈控制功能，确保工艺过程的稳定性和一致性。
多功能性：支持多种工作模式，适应不同的工艺要求。
应用领域：
半导体制造：用于薄膜沉积、刻蚀和其他等离子体处理工艺，确保高质量的薄膜和精确的刻蚀过程。
光伏产业：在太阳能电池的制造过程中，用于薄膜沉积和表面处理，提升光电转换效率。
显示面板生产：用于 OLED 和 LCD 面板的制造过程，确保薄膜的均匀性和质量。
材料科学研究：在材料科学实验中，用于薄膜制备和表面改性，支持新材料的研究和开发。
AE APEX5513 射频发生器以其卓越的性能和可靠性，成为高精度工艺控制领域的重要设备。
英文资料：
AE APEX5513 is a high-performance radio frequency (RF) generator produced by Advanced Energy (AE), widely used in semiconductor manufacturing, thin film deposition, plasma processing, and other fields.
Main features:
High power density: Provides up to 1.5 kW of output power to meet the needs of high-power applications.
Compact design: The compact body design saves space and facilitates integration into existing systems.
Precise control: With precise power regulation and feedback control functions, it ensures the stability and consistency of the process.
Multifunctionality: Supports multiple working modes and adapts to different process requirements.
Application areas:
Semiconductor manufacturing: used for thin film deposition, etching, and other plasma processing processes to ensure high-quality thin films and precise etching processes.
Photovoltaic industry: used in the manufacturing process of solar cells for thin film deposition and surface treatment to improve photoelectric conversion efficiency.
Display panel production: used in the manufacturing process of OLED and LCD panels to ensure the uniformity and quality of the film.
Materials Science Research: Used in materials science experiments for thin film preparation and surface modification, supporting the research and development of new materials.
The AE APEX5513 RF generator has become an important equipment in the field of high-precision process control due to its excellent performance and reliability.
2.产 品 展 示
3.其他产品
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| 6ES5998-2UL24 | CACR-TS555Z1SRY9 | C52711-022 |
| 6ES5998-2DB31 | CACR-SR03TZ0SFY01A | CE945GM2B-440 |
| 6ES5998-1UD31 | CACR-SR20SZ1SFY91 | exm-10a |
| 6ES5998-1MF23 | CACR-PR07BC3BM | 61-0654-22 |
| 6ES5998-1DL31 | CACR-SR15BE | CE945GM2A-L24 |
| 6ES5998-1DB11 | CACR-180-PD1VDS03 | EPC21 |
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