MKS AX8410-28HC发电机模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
MKS AX8410-28HC 是 MKS Instruments 生产的一款高功率激励系统控制器模块，主要用于等离子体处理和薄膜沉积等应用。
主要特点：
- 高功率输出： 提供高达 10 kW 的功率输出，满足大功率等离子体处理和薄膜沉积的需求。
- 宽频率范围： 支持从 10 kHz 到 100 MHz 的频率范围，适应不同的工艺要求。
- 高效率： 采用先进的功率转换技术，提供高效率的能量传输，降低能耗。
- 精确控制： 配备精确的功率和频率控制功能，确保工艺过程的稳定性和一致性。
应用领域：
该激励系统控制器广泛应用于以下领域：
- 半导体制造： 用于薄膜沉积、刻蚀和其他等离子体处理工艺。
- 材料科学： 用于研究和开发新材料的薄膜沉积和表面处理。
- 光伏产业： 用于太阳能电池的薄膜沉积和表面处理。
- 显示技术： 用于液晶显示器和有机发光二极管（OLED）的制造过程。
维护与更换：
长期使用可能导致模块性能下降，定期检查和更换该模块可以确保工艺过程的稳定性和高效运行。
英文资料：
MKS AX8410-28HC is a high-power excitation system controller module produced by MKS Instruments, mainly used for applications such as plasma treatment and thin film deposition.
Main features:
High power output: Provides up to 10 kW of power output to meet the needs of high-power plasma processing and thin film deposition.
Wide frequency range: Supports a frequency range from 10 kHz to 100 MHz to meet different process requirements.
High efficiency: Adopting advanced power conversion technology to provide efficient energy transmission and reduce energy consumption.
Precise control: equipped with precise power and frequency control functions to ensure the stability and consistency of the process.
Application areas:
This incentive system controller is widely used in the following fields:
Semiconductor manufacturing: used for thin film deposition, etching, and other plasma treatment processes.
Materials Science: Used for researching and developing thin film deposition and surface treatment of new materials.
Photovoltaic industry: used for thin film deposition and surface treatment of solar cells.
Display technology: used in the manufacturing process of liquid crystal displays and organic light-emitting diodes (OLEDs).
Maintenance and replacement:
Long term use may lead to a decrease in module performance. Regular inspection and replacement of the module can ensure the stability and efficient operation of the process.
2.产 品 展 示
3.其他产品
ABB UFC760BE142 3BHE004573R0142 控制器模块
4.其他英文产品
ASEA DSPC150 Robot Control Board
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