ZYGO 7702 BH5-6314激光头 PDF资料 

1.产 品 资 料 介 绍：

中文资料：

ZYGO 7702 BH5-6314 激光头是一款高精度的双频氦氖激光干涉测量光源，主要用于精密测量和位移跟踪。其应用领域广泛，涵盖半导体制造、精密机加工、计量校准等高要求行业。以下是其主要应用领域和详细介绍：

1. 半导体制造与光刻工艺

在半导体行业，纳米级的测量精度至关重要，ZYGO 7702 BH5-6314 激光头在以下方面发挥关键作用：

• 光刻机对准：用于晶圆对准和位置反馈，确保每一层电路图案的精确叠加。
• 晶圆定位与运动控制：监测晶圆台的纳米级移动，提高曝光精度。
• 掩模对准：用于光掩模版的精准定位，减少误差。
• 晶圆平整度检测：用于测量晶圆的翘曲度，优化生产工艺。

2. 精密计量与干涉测量

ZYGO 激光头广泛用于精密干涉测量仪器，如白光干涉仪、轮廓测量仪等，适用于：

• 纳米级长度测量：在计量实验室用于高精度长度基准测量，如校准量块、尺子、干涉仪等。
• 表面形貌检测：检测光学元件、镜片、玻璃基板的表面粗糙度和形状误差。
• 非接触式测量：避免传统机械测量的误差，提高测量精度。

3. 精密机械加工与CNC控制

高端机床、CNC 设备等制造系统需要高精度反馈系统，ZYGO 7702 BH5-6314 可用于：

• 数控机床的高精度位置反馈：如五轴加工中心、超精密车削机床。
• 刀具位移监测：确保刀具在纳米级精度内切削，提高加工一致性。
• 零件尺寸控制：用于在线检测，确保加工零件符合公差要求。

英文资料：

ZYGO 7702 BH5-6314 laser head is a high-precision dual frequency helium neon laser interferometric measurement light source, mainly used for precision measurement and displacement tracking. It has a wide range of applications, covering high demand industries such as semiconductor manufacturing, precision machining, and metrology calibration. The following are its main application areas and detailed introduction:

1. Semiconductor manufacturing and photolithography process

In the semiconductor industry, nanoscale measurement accuracy is crucial, and the ZYGO 7702 BH5-6314 laser head plays a key role in the following aspects:

Lithography machine alignment: used for wafer alignment and position feedback to ensure precise stacking of each layer circuit pattern.

Wafer positioning and motion control: Monitor the nanoscale movement of the wafer stage to improve exposure accuracy.

Mask alignment: used for precise positioning of photomask templates to reduce errors.

Wafer flatness detection: used to measure the warpage of wafers and optimize production processes.

2. Precision metrology and interferometry

ZYGO laser heads are widely used in precision interferometric measuring instruments, such as white light interferometers, contour measuring instruments, etc., and are suitable for:

Nanoscale length measurement: used in metrology laboratories for high-precision length benchmark measurement, such as calibration blocks, rulers, interferometers, etc.

Surface morphology detection: detecting the surface roughness and shape errors of optical components, lenses, and glass substrates.

Non contact measurement: avoids the errors of traditional mechanical measurement and improves measurement accuracy.

3. Precision machining and CNC control

High precision feedback systems are required for manufacturing systems such as high-end machine tools and CNC equipment. ZYGO 7702 BH5-6314 can be used for:

High precision position feedback for CNC machine tools, such as five axis machining centers and ultra precision turning machines.

Tool displacement monitoring: Ensure that the tool cuts with nanometer level accuracy, improving machining consistency.

Part size control: used for online inspection to ensure that processed parts meet tolerance requirements.

2.产      品      展      示      

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ASEA DSQC223机器人控制板

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ABB XVC768115 thyristor module

AMAT 0190-24282 encoder module

AMAT 0190-11415 Digital Input Module

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcS

品牌：ZYGO 

型号：7702 BH5-6314激光头

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

                    WOODWARD、EMERSON、RELIANCE、DEIF、NI、XYVOM等

特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

应用行业：广泛应用于冶金、石油天然气、玻璃制造业、铝业、石油化工、煤矿、造纸印刷、纺织印染、机械、电子制造、汽车制造、烟草、塑胶机械、电力、水利、水处理/环保、市政工程、锅炉供暖、能源、输配电等

快递方式：国内顺丰、德邦、京东快递包邮，按照实际报价货期发货  P8123