LAM 810-328372-002气体面板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
LAM 810-328372-002 气体面板 是泛林半导体（LAM Research）设备中的一个关键组件，通常用于半导体制造过程中的气体控制系统。该气体面板能够精确地控制和分配不同的气体，以满足工艺过程中的严格需求，确保设备的运行稳定性和工艺的精确性。
产品特点
气体分配与控制：
- 该气体面板提供精确的气体流量控制，能够调节不同类型气体的供应，以确保半导体制造过程中气体流量的准确性和稳定性。
- 可以支持多种气体（如氮气、氧气、氢气、氯气等）的输入，并根据工艺要求分配到不同的部件或模块。
高精度传感器：
- 配备高精度气体流量传感器，实时监控气体流量、压力和温度等参数，确保气体供应符合工艺需求。
- 内置故障检测功能，确保系统在出现异常时能够及时报警，防止工艺偏差。
模块化设计：
- 紧凑的模块化结构，便于安装和维护，能够与其他设备系统（如气体供给系统、气体过滤系统等）无缝集成。
- 提供易于连接的接口，支持与现有设备的快速集成。
耐腐蚀材料：
- 采用耐腐蚀、耐高温的材料制造，确保在高腐蚀性气体和高温环境下稳定运行。
安全性和保护功能：
- 内置气体泄漏检测和自动切断功能，确保在发生气体泄漏或系统异常时，能迅速停止气体供应并报警。
英文资料：
The LAM 810-328372-002 gas panel is a critical component in LAM Research equipment, typically used in gas control systems during semiconductor manufacturing processes. This gas panel can accurately control and distribute different gases to meet the strict requirements of the process, ensuring the stability of equipment operation and the accuracy of the process.
Product Features
Gas distribution and control:
This gas panel provides precise gas flow control and can regulate the supply of different types of gases to ensure the accuracy and stability of gas flow in the semiconductor manufacturing process.
It can support the input of multiple gases (such as nitrogen, oxygen, hydrogen, chlorine, etc.) and allocate them to different components or modules according to process requirements.
High precision sensors:
Equipped with high-precision gas flow sensors, real-time monitoring of gas flow rate, pressure, temperature and other parameters to ensure that gas supply meets process requirements.
Built in fault detection function ensures that the system can alarm in a timely manner when abnormalities occur, preventing process deviations.
Modular design:
Compact modular structure, easy to install and maintain, can seamlessly integrate with other equipment systems such as gas supply systems, gas filtration systems, etc.
Provide an easy to connect interface that supports rapid integration with existing devices.
Corrosion resistant materials:
Made of corrosion-resistant and high-temperature resistant materials to ensure stable operation in highly corrosive gases and high-temperature environments.
Security and protection functions:
Built in gas leak detection and automatic shut-off function ensure that gas supply can be quickly stopped and an alarm can be triggered in case of gas leakage or system abnormalities.
2.产 品 展 示
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